Morphology characterization of polishing spot and process parameters optimization in magnetorheological finishing

Liu, Shiwei; Wang, Hongxiang; Hou, Jing; Zhang, Qinghua; Zhong, Bo; Chen, Xianhua; Zhang, Mingzhuang

doi:10.1016/j.jmapro.2022.06.008

Cited by 15 publications

(6 citation statements)

References 24 publications

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“…We investigated the influence of these process parameters on the removal function to better control the individual process parameters according to requirements during the actual process. For each of the four process parameters—wheel rotational speed, polishing fluid flow, magnetic field, and ribbon indentation depth—three levels of MRF process equipment and actual working conditions would require 81 (3 4 ) trials to achieve a comparison of each factor individually [ 36 ].…”

Section: Methodsmentioning

confidence: 99%

“…The number of trials is so large that it is difficult to study each factor, so this experiment uses a scientific experimental method—the orthogonal test method. The orthogonal experimental method is a method that uses statistical views, applies the principle of orthogonality, and uses orthogonal tables to arrange the characteristics of equilibrium matching [ 24 , 36 ]. The orthogonal test method can reduce the number of tests, and the processing of test results is more scientific.…”

Section: Methodsmentioning

confidence: 99%

“…The forces exerted on the surface of the abrasive grain during MRF consist of gravity, magnetization pressure, and fluid dynamic pressure, where gravity is negligible [36,37].…”

Section: Materials Removal Model Of Mrfmentioning

confidence: 99%

“…The forces exerted on the surface of the abrasive grain during MRF consist of gravity, magnetization pressure, and fluid dynamic pressure, where gravity is negligible [ 36 , 37 ]. P = P m + P d where P m is the magnetization pressure generated by the gradient magnetic field, and P d is the fluid dynamic pressure generated by the flow of the polishing fluid.…”

Section: Analysis Of Removal Characteristics Of Mrfmentioning

confidence: 99%

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Nano-Precision Processing of NiP Coating by Magnetorheological Finishing

Peng

et al. 2023

Nanomaterials

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NiP coating has excellent physicochemical properties and is one of the best materials for coating optical components. When processing NiP coatings on optical components, single-point diamond turning (SPDT) is generally adopted as the first process. However, SPDT turning produces periodic turning patterns on the workpiece, which impacts the optical performance of the component. Magnetorheological finishing (MRF) is a deterministic sub-aperture polishing process based on computer-controlled optical surface forming that can correct surface shape errors and improve the surface quality of workpieces. This paper analyzes the characteristics of NiP coating and develops a magnetorheological fluid specifically for the processing of NiP coating. Based on the basic Preston principle, a material removal model for the MRF polishing of NiP coating was established, and the MRF manufacturing process was optimized by orthogonal tests. The optimized MRF polishing process quickly removes the SPDT turning tool pattern from the NiP coating surface and corrects surface profile errors. At the same time, the surface quality of the NiP coating has also been improved, with the surface roughness increasing from Ra 2.054 nm for SPDT turning to Ra 0.705 nm.

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Section: Methodsmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 99%

“…The forces exerted on the surface of the abrasive grain during MRF consist of gravity, magnetization pressure, and fluid dynamic pressure, where gravity is negligible [36,37].…”

Section: Materials Removal Model Of Mrfmentioning

confidence: 99%

Section: Analysis Of Removal Characteristics Of Mrfmentioning

confidence: 99%

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Nano-Precision Processing of NiP Coating by Magnetorheological Finishing

Peng

et al. 2023

Nanomaterials

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“…CMP can realize the smooth and flat processing of GaN crystals, but its efficiency needs to be improved further. Magnetorheological finishing is a non-damage processing technology [21][22][23][24][25], which can effectively realize sub-nanometer processing of hard and brittle crystal materials such as sapphire [26,27], silicon carbide [28,29], and optical glass [30][31][32]. However, research on GaN magnetorheological finishing has not been reported.…”

Section: Introductionmentioning

confidence: 99%

Study on new magnetorheological chemical polishing process for GaN crystals: polishing solution composition, process parameters, and roughness prediction model

Wu¹,

Afzal²,

Huang³

et al. 2023

Smart Mater. Struct.

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High-quality and high-efficiency processing of gallium nitride (GaN) crystals is urgently required for optoelectronic communications and other major industries. This study proposes a novel high-efficiency non-damage magnetorheological chemical polishing (MCP) process to overcome the existing problems of low efficiency and lattice distortion during processing. The effects of the MCP fluid composition and key processing parameters on the surface roughness and material removal rate (MRR）of GaN crystals were studied experimentally. The results showed that a compounded abrasive containing silica fluid exhibited better polishing effects than a single abrasive. The polishing efficiency could be improved by adding NaOH solid particles, and the MRR reached 13.19 nm min-1 when the pH of the MCP fluid was 10. The MRR increased gradually with an increase in the pole rotation speed and worktable speed and a decrease in the polishing gap. The surface roughness of the GaN crystals was improved from Ra 115 nm to Ra 0.375 nm after polishing for 4 h. The surface and sub-surface damage of the polished GaN crystals was analyzed using scanning electron microscope (SEM) and transmission electron microscope (TEM). The results confirmed that the MCP process can realize the non-damage polishing of GaN crystals. Moreover, a prediction model for the surface roughness of GaN crystals in the MCP process was constructed. The overall difference between the actual and predicted surface roughness values for the model was 11.6%.

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Magnetic field-assisted finishing: mechanism, application, and outlook

Yan,

Yang,

et al. 2023

Int J Adv Manuf Technol

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Morphology characterization of polishing spot and process parameters optimization in magnetorheological finishing

Cited by 15 publications

References 24 publications

Nano-Precision Processing of NiP Coating by Magnetorheological Finishing

Nano-Precision Processing of NiP Coating by Magnetorheological Finishing

Study on new magnetorheological chemical polishing process for GaN crystals: polishing solution composition, process parameters, and roughness prediction model

Magnetic field-assisted finishing: mechanism, application, and outlook

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