Here surface potential of chemical vapor deposition (CVD) grown 2D MoS with various layers is reported, and the effect of adherent substrate and light illumination on surface potential of monolayer MoS are investigated. The surface potential of MoS on Si/SiO substrate decreases from 4.93 to 4.84 eV with the increase in the number of layer from 1 to 4 or more. Especially, the surface potentials of monolayer MoS are strongly dependent on its adherent substrate, which are determined to be 4.55, 4.88, 4.93, 5.10, and 5.50 eV on Ag, graphene, Si/SiO , Au, and Pt substrates, respectively. Light irradiation is introduced to tuning the surface potential of monolayer MoS , with the increase in light intensity, the surface potential of MoS on Si/SiO substrate decreases from 4.93 to 4.74 eV, while increases from 5.50 to 5.56 eV on Pt substrate. The I-V curves on vertical of monolayer MoS /Pt heterojunction show the decrease in current with the increase of light intensity, and Schottky barrier height at MoS /Pt junctions increases from 0.302 to 0.342 eV. The changed surface potential can be explained by trapped charges on surface, photoinduced carriers, charge transfer, and local electric field.