2003
DOI: 10.1364/ol.28.000890
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MSTAR: a submicrometer absolute metrology system

Abstract: The Modulation Sideband Technology for Absolute Ranging (MSTAR) sensor permits absolute distance measurement with subnanometer accuracy, an improvement of 4 orders of magnitude over current techniques. The system uses fast phase modulators to resolve the integer cycle ambiguity of standard interferometers. The concept is described and demonstrated over target distances up to 1 m. The design can be extended to kilometer-scale separations.

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Cited by 73 publications
(25 citation statements)
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“…Moreover, interferometers with high spectral sensitivity are becoming more and more desired in applications such as metrology, 5 optical sensing, 6 quantum information processing, 7 and biomedical engineering. 8 A number of schemes have been proposed to enhance the performance of interferometers, such as using PhC structures to minimize the size of on-chip devices 9 and electromagnetically induced transparency to increase the rotation sensitivity of a Sagnac interferometer.…”
Section: Slow Lightmentioning
confidence: 99%
“…Moreover, interferometers with high spectral sensitivity are becoming more and more desired in applications such as metrology, 5 optical sensing, 6 quantum information processing, 7 and biomedical engineering. 8 A number of schemes have been proposed to enhance the performance of interferometers, such as using PhC structures to minimize the size of on-chip devices 9 and electromagnetically induced transparency to increase the rotation sensitivity of a Sagnac interferometer.…”
Section: Slow Lightmentioning
confidence: 99%
“…Using multiple 40 GHz phase modulations of a CW laser, MSTAR [6] has reached nm-scale accuracy. More recently Coddington et al [7] have demonstrated a laser ranging scheme that efficiently combines time-of-flight and interference measurements in a single measurement inspired from optical linear sampling [8].…”
Section: Introductionmentioning
confidence: 99%
“…Devices with large spectral sensitivity are becoming increasingly desirable in applications such as metrology, optical sensing, quantum information processing, and biomedical engineering [1][2][3][4]. Although the spectral sensitivity can be enhanced using slow light [5,6], the central measurement is usually that of the optical phase, and therefore requires the use of an interferometer.…”
Section: Introductionmentioning
confidence: 99%