2005
DOI: 10.1016/j.nima.2005.08.068
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Multi-element cylindrical electrostatic lens systems for focusing and controlling charged particles

Abstract: This paper describes theoretical modelling of electrostatic lenses based on 3, 4 and 5 closely spaced cylindrical electrodes, respectively. In each case, modelling is carried out numerically using commercial packages SIMION and LENSYS, and a variety of performance parameters are obtained. These include the magnification, the 3 rd order spherical and chromatic aberration coefficients. Special cases such as zoom lens (i.e., lenses whose magnification may be changed without losing focus) are considered. Results a… Show more

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Cited by 42 publications
(30 citation statements)
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“…This lens is composed of three cylindrical accelerator tube electrodes placed just after the ion source. The beam focus is achieved by setting the proper voltage in the middle electrode [8]. As the supply of this voltage is connected to the source potential, the voltage must be negative, so that the middle electrode can be biased with a voltage between the source and tube electrodes.…”
Section: Beam Focusingmentioning
confidence: 99%
“…This lens is composed of three cylindrical accelerator tube electrodes placed just after the ion source. The beam focus is achieved by setting the proper voltage in the middle electrode [8]. As the supply of this voltage is connected to the source potential, the voltage must be negative, so that the middle electrode can be biased with a voltage between the source and tube electrodes.…”
Section: Beam Focusingmentioning
confidence: 99%
“…Among these optical tools, three-element electrostatic cylindrical lens systems are perfectly suited to use in collision experiments [3,4]. These lenses can be effectively operated with different magnifications while keeping the image points.…”
Section: Introductionmentioning
confidence: 99%
“…Among the computer codes for simulating the extraction of space-charge-dominated ion beams from plasma ion sources are those described according to Whealton and Whitson (1980), Whealton et al (1988), Boers (1993), Spadtke (1983) and Becker and Herrmannsfeldt (1992). Electrostatic cylinder lenses are widely used to control beams of charged particles with different energies and directions in experiments covering many applications including electron spectroscopy, surface science and mass spectroscopy (Sise et al, 2007;2005), and find use in focused ion beam systems, where they are more effective than magnetic lenses.…”
Section: Introductionmentioning
confidence: 99%