Multi-element uncooled sensors based on organic pyroelectric films integrated with CCD

Chernokozhin, Vladimir V.; Pevtsov, E Ph; Pospelova, Marina A.; Сигов, А. С.

doi:10.1080/00150199908009112

Cited by 2 publications

(3 citation statements)

References 3 publications

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“…One of the ways of mastering this difficulty is the use of electronic correction of the nonuniformity. To find another way, we investigated carefully the pyroelectric coefficient dependence on polarization conditions of thin PZT films [8,9]. These studies, as well as the results of Ref.…”

Section: Fabrication and Investigations Of Pyroelectric-ccd Structuresmentioning

confidence: 99%

Pyroelectric Thin Films Integrated with CCD

Сигов¹,

Pevtsov²,

Gorelov³

et al. 2004

Integrated Ferroelectrics

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We report on fabrication and characterization of three types of pyroelectric thin films: PbZr 0.53 Ti 0.47 O 3 and BaTiO 3 ceramics, PVDF, and polycyclic organic compound (TADPh). A theoretical model of uncooled focal plane array (UFPA) based on pyroelectric thin film integrated with CCD is proposed. The model of UFPA was designed around the heat balance equations and equivalent circuit. A modified technology of integrated structures of multi-element pyroelectric detectors and special-purpose CCD is proposed. There are designer and manufactured a completely monolithic 100 × 100 µm 2 pyroelectric sensor array based on a heat-sensitive film construction lifted slightly above the crystal and also detector specimens with NETD less than 0.2 K (8-12 µm at 300 K and 20 Hz). Derived measurements and investigations allowed us to choose the structure of 2D analogue CCD processor integrated with pyroelectric membrane array.

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Section: Fabrication and Investigations Of Pyroelectric-ccd Structuresmentioning

confidence: 99%

Pyroelectric Thin Films Integrated with CCD

Сигов¹,

Pevtsov²,

Gorelov³

et al. 2004

Integrated Ferroelectrics

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“…Of the most efficiency, to our opinion, appear to be the methods using achievements of the so-called micro-electromechanical systems (MEMS) technology [6,7] improved for polyimide and PVDF films [5]. A schematic view of an example of the structure proposed is given in Fig.…”

Section: Detector Structure Materials and Fabricationmentioning

confidence: 99%

“…the optimum heat transfer layer thickness is about 0.5...2.0µm. Looking for appropriate pyroelectric films we fabricated and studied a lot of non-organic ferroelectric thin films such as PZT, BST [1] and organic pyroelectric film of policyclic organic compound (TADPh) and of polyvinylidene fluoride (PVDF) [5]. Trying to achieve the UFPA manufacturing technology simplicity we fixed our choice on the construction described lower.…”

Section: Detector Structure Materials and Fabricationmentioning

confidence: 99%

<title>Uncooled array IR sensors integrated with CCD analog processor</title>

2002

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Abstracts. The technological methods proposed above allow one to prepare integrated structures of multielement heat detectors and special CCD. In thin structure the sensitive film is isolated from the substrate by means of a supporting membrane or serves as the membrane itself. Such a technology seems to be advantageous in further development of different MEMS structures. There is created a completely monolithic pyroelectric array of sensors 100×100 µm 2 based on a heat-sensitive film construction lifted slightly above the crystal and also detector specimens with NETD less than 0.2-0.5 K (8-12 µm at 300 K and 20-50 Hz of modulation frequency). Derived measurements and investigations allowed us to choose the structure of 2D analog CCD processor which now is under design and which will be integrated with pyroelectric membrane array.

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Multi-element uncooled sensors based on organic pyroelectric films integrated with CCD

Cited by 2 publications

References 3 publications

Pyroelectric Thin Films Integrated with CCD

Pyroelectric Thin Films Integrated with CCD

<title>Uncooled array IR sensors integrated with CCD analog processor</title>

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