Multi-focus two-photon polymerization technique based on individually controlled phase modulation

Obata, Kotaro; Koch, Jürgen; Hinze, U.; Chichkov, Boris N.

doi:10.1364/oe.18.017193

Cited by 139 publications

(65 citation statements)

References 30 publications

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“…For reduction of the processing time, WOW-2PP can be combined with multi-focus structuring. 22,23 We hope that the demonstrated WOW-2PP technique can bring 2PP closer to applications.…”

Section: Resultsmentioning

confidence: 99%

High-aspect 3D two-photon polymerization structuring with widened objective working range (WOW-2PP)

et al. 2013

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We developed a novel two-photon polymerization (2PP) configuration for fabrication of high-aspect three-dimensional (3D) structures, with an overall height larger than working distance of the microscope objective used for laser beam focusing into a photosensitive material. This method is based on a modified optical 2PP setup, where a microscope objective (1003 high N.A.), immersion oil and cover glass can be moved together into the photosensitive material, resulting in an effective higher and wider objective working range (WOW-2PP). The proposed technique enables the fabrication of high-aspect structures with sub-micrometer process resolution. 3D structures with a height of 7 mm are demonstrated, which could hardly be built with the conventional 2PP set-up due to refractive index mismatch and laser beam disturbances.

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“…For reduction of the processing time, WOW-2PP can be combined with multi-focus structuring. 22,23 We hope that the demonstrated WOW-2PP technique can bring 2PP closer to applications.…”

Section: Resultsmentioning

confidence: 99%

High-aspect 3D two-photon polymerization structuring with widened objective working range (WOW-2PP)

et al. 2013

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“…Spatial manipulation of laser pulses is effective to increase the fabrication speed, that is, increased throughput by multibeam parallel processing and enhancement of the laser energy utilization efficiency [135][136][137][138][139][140]. Temporal beam shaping enables the laser energy to be efficiently deposited to the materials, which improves the fabrication quality and resolution.…”

Section: Shaped Beam Processingmentioning

confidence: 99%

“…Different types of bent optical waveguides can be written by continuously changing the positions of the laser spots through the switching of computer-generated holograms (CGHs) because the spatial phase distribution is modulated by the CGH on a liquid-crystal SLM, which is not possible with passive optical components. The multiple parallel pulses generated by an SLM have also been applied to fabricate complex 2D and 3D microstructures, both symmetric and asymmetric, by TPP [138], where each focus spot in the parallel pulses was individually controlled in terms of position and laser intensity. Figure 18 shows a schematic and an SEM image of the parallel fabrication of asymmetric 3D microstructures.…”

Section: Spatial Beam Shapingmentioning

confidence: 99%

Progress in ultrafast laser processing and future prospects

Sugioka

2017

Nanophotonics

179

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Abstract:The unique characteristics of ultrafast lasers have rapidly revolutionized materials processing after their first demonstration in 1987. The ultrashort pulse width of the laser suppresses heat diffusion to the surroundings of the processed region, which minimizes the formation of a heat-affected zone and thereby enables ultrahigh precision micro-and nanofabrication of various materials. In addition, the extremely high peak intensity can induce nonlinear multiphoton absorption, which extends the diversity of materials that can be processed to transparent materials such as glass. Nonlinear multiphoton absorption enables three-dimensional (3D) micro-and nanofabrication by irradiation with tightly focused femtosecond laser pulses inside transparent materials. Thus, ultrafast lasers are currently widely used for both fundamental research and practical applications. This review presents progress in ultrafast laser processing, including micromachining, surface micro-and nanostructuring, nanoablation, and 3D and volume processing. Advanced technologies that promise to enhance the performance of ultrafast laser processing, such as hybrid additive and subtractive processing, and shaped beam processing are discussed. Commercial and industrial applications of ultrafast laser processing are also introduced. Finally, future prospects of the technology are given with a summary.

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“…Previously, a major drawback of the multifocus parallel laser fabrication was that it could be used only for fabricating the microstructures arranged in periodic arrays. Obata et al have recently developed a multifocus two-photon polymerization technique based on the individually controlled phase modulation that permits the rapid prototyping of the complex 2D and 3D structures (both symmetric and asymmetric structures) [26] .…”

Section: Femtosecond Laser Direct Writing Systemsmentioning

confidence: 99%

A tutorial on optics for ultrafast laser materials processing: basic microprocessing system to beam shaping and advanced focusing methods

Sugioka

Cheng

2012

Advanced Optical Technologies

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Ultrafast lasers have excellent characteristics for materials processing in terms of precision and quality. This tutorial paper introduces the basic concepts of ultrafast laser materials processing and the structure and key components of typical ultrafast laser microprocessing systems. The emphasis is on the pulse-shaping devices and systems for controlling and manipulating the spatial, temporal, and polarization properties of focused femtosecond laser pulses.

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Multi-focus two-photon polymerization technique based on individually controlled phase modulation

Cited by 139 publications

References 30 publications

High-aspect 3D two-photon polymerization structuring with widened objective working range (WOW-2PP)

High-aspect 3D two-photon polymerization structuring with widened objective working range (WOW-2PP)

Progress in ultrafast laser processing and future prospects

A tutorial on optics for ultrafast laser materials processing: basic microprocessing system to beam shaping and advanced focusing methods

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