Multi-Frequency Thin Film HBAR Microsensor for Acoustic Impedance Sensing Over the GHz Range

Yanez, Jesus; Uranga, A.; Barniol, N.

doi:10.1109/transducers50396.2021.9495750

Cited by 3 publications

(3 citation statements)

References 7 publications

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“…In more detail, the FBAR can be operated in two basic resonant modes: The first mode is known as the longitudinal mode, and it generates a longitudinal acoustic wave across the two surfaces of the top and bottom electrodes when an RF signal is applied to both electrodes [271][272][273]. The second mode is known as the thickness-shear mode, and it occurs when a shear wave is formed between the top and bottom electrodes as a response to the applied alternating voltage.…”

Section: Film Bulk Acoustic Resonatormentioning

confidence: 99%

A review of piezoelectric MEMS sensors and actuators for gas detection application

et al. 2023

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Piezoelectric microelectromechanical system (piezo-MEMS)-based mass sensors including the piezoelectric microcantilevers, surface acoustic waves (SAW), quartz crystal microbalance (QCM), piezoelectric micromachined ultrasonic transducer (PMUT), and film bulk acoustic wave resonators (FBAR) are highlighted as suitable candidates for highly sensitive gas detection application. This paper presents the piezo-MEMS gas sensors’ characteristics such as their miniaturized structure, the capability of integration with readout circuit, and fabrication feasibility using multiuser technologies. The development of the piezoelectric MEMS gas sensors is investigated for the application of low-level concentration gas molecules detection. In this work, the various types of gas sensors based on piezoelectricity are investigated extensively including their operating principle, besides their material parameters as well as the critical design parameters, the device structures, and their sensing materials including the polymers, carbon, metal–organic framework, and graphene.

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Section: Film Bulk Acoustic Resonatormentioning

confidence: 99%

A review of piezoelectric MEMS sensors and actuators for gas detection application

et al. 2023

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“…A viscosity sensor utilizing shear waves, with good agreement between the theoretical model and the experiment, was developed by Yamakawa [21]. Different approaches to the detection of liquid in micro-trenches were studied by Yanez [22,23]. The authors of the work [23] also showed that HBAR could not only be successfully utilized as a resonator, but also could operate in an echo-pulse mode.…”

Section: Introductionmentioning

confidence: 99%

“…Different approaches to the detection of liquid in micro-trenches were studied by Yanez [22,23]. The authors of the work [23] also showed that HBAR could not only be successfully utilized as a resonator, but also could operate in an echo-pulse mode. These authors also presented the possibility of creating a reliable fingerprint scanner based on the array of HBARs with 366 dpi resolution.…”

Section: Introductionmentioning

confidence: 99%

Microwave Diamond-Based HBAR as a Highly Sensitive Sensor for Multiple Applications: Acoustic Attenuation in the Mo Film

Sorokin

Asafiev

Yashin

et al. 2023

Sensors

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The application of microwave diamond-based HBAR as a sensor of microwave acoustic attenuation α was considered, using the Mo film as an object of research. A multilayered piezoelectric structure, as the Al/Al0.73Sc0.27N/Mo/(100) diamond/Mo, was produced using aluminum–scandium nitride composition, and was studied in detail for a number of the Mo films with different thicknesses obtained by magnetron deposition. The operational frequency band of 3.3 … 18 GHz was used. It was found that the dependence of the resonant frequency shift vs. the h(Mo) thickness for all the overtones to be investigated was linear. For a given sensor, it was found that the mass sensitivity per unit area rm was equal to −26 × 10−12 and −8.7 × 10−12 g/(cm2∙Hz) at 6.0 GHz and 18.3 GHz, respectively. The frequency dependencies of quality factor Q, which changed as a result of Mo film deposition, were considered as the basic experimental data. A method for extracting the α(Mo) values was proposed. The Q-factor under the complete deposition of Mo film was 936 nm, and dropped moderately to ~25%. Such values were enough for an aim of the given experiment. The α(f) in molybdenum was obtained, and demonstrated a dependence that was close to quadratic, corresponding to the Akhiezer attenuation law.

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Fluid compressional properties sensing at microscale using a longitudinal bulk acoustic wave transducer operated in a pulse-echo scheme

Yanez

Uranga

Barniol

2022

Sensors and Actuators A: Physical

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Multi-Frequency Thin Film HBAR Microsensor for Acoustic Impedance Sensing Over the GHz Range

Cited by 3 publications

References 7 publications

A review of piezoelectric MEMS sensors and actuators for gas detection application

A review of piezoelectric MEMS sensors and actuators for gas detection application

Microwave Diamond-Based HBAR as a Highly Sensitive Sensor for Multiple Applications: Acoustic Attenuation in the Mo Film

Fluid compressional properties sensing at microscale using a longitudinal bulk acoustic wave transducer operated in a pulse-echo scheme

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