Multi-function and cascadable MEMS logic device

Abstract

We present a reprogrammable Microelectromechanical systems (MEMS) logic device that can perform the fundamental logic gate AND, a universal logic gate NAND, and a tristate logic gate using mixed-frequency excitation. The concept is based on exciting combination resonances due to the mixing of two or more input signals. The device vibrates at two steady states; a high state when the combination resonance is activated and a low state when no resonance is activated. These vibration states are assigned to logical value 1 or 0 to realize these logic gates. Using AC signals to drive the resonator and to execute the logic inputs unifies the input and output wave forms of the logic device, thereby opening the possibility for cascading among logic devices. Moreover, the ability to perform these logic operations at any input frequency using frequency mixing techniques allows for overcoming the limitation of having a fixed operating frequency. These characteristics of such logic devices lay down the basis to achieve complex computing operations.

Voltage and Deflection Amplification via Double Resonance Excitation in a Cantilever Microstructure

“…While considerable attention has been given to MEMS resonators to serve as the next logic gate chips due to their low power consumption and high integration density capabilities [2], none of the reported methods in the literature allows cascading multiple MEMS logic gates since they require different input and output signals and because the output signals suffer from huge voltage attenuation. A state-of-the-art solution proposed for these problems is to place amplifiers and frequency dividers between MEMS logic gates to function [26] in Figure 8a. Ideally, we want a MEMS logic gate resonator that can be easily integrated with other logic gates to form a complete integrated circuit (IC) without the need for any complementary metal-oxide-semiconductor (CMOS) part, Figure 8b.…”

“…Utilizing mechanical resonance is a common way of amplifying the response of a MEMS structure. Previous works extended this concept using multifrequency excitation signals to increase MEMS filter bandwidth [23,24,25,26], the signal-to-noise ratio in microgyroscope applications, [27] and the harvested energy in MEMS harvester [28]. Finally, as MEMS devices also act as capacitors; electrical resonance was utilized for detection through electrical resonant frequency shift in an RLC circuit [29] and to amplify the MEMS response by forming an LC tank circuit or a resonant drive circuit [30,31].…”

Near Zero Power Smart Material that Senses, Computes, and Actuates

“…4 However, poor cascading compatibility of the MEMS-based logic gates to realize an integrated-like circuit poses a signi cant challenge. 5 Inspired by biological systems, that compute at the sensor level via sensory neurons and utilize massively parallel, energy-e cient computing in the brain, we present the rst demonstration of a MEMS neural network hardware that can perform simultaneous acceleration sensing and perform a classi cation problem at the same sensor physical layer. This novel computing architecture besides eliminating the need for the complex sensors interface and a digital computing unit to perform similar computation leads to new types of hardware that perform machine learning methods that are no longer shallow and separate between the sensing and the computing layers.…”

Design and analysis of optical nano electro-mechanical-system-based logic circuits relied on movable waveguides

“…28 The working principle of these structures relies on two different vibration states of a resonator as the logical values 1 and 0 to achieve reliable, low-power circuits. 13,29,30 This paper presents a novel approach using optical NEMS actuators to develop zero off-state leakage NEMS switches as choices for transistors in the switching mechanism, which can be appealing to implement processor circuits. The operating principle of the proposed mechanism is first described.…”

“…For this reason, noncontact-based devices using MEMS/NEMS resonators or optical switches have been studied in recent researches 28 . The working principle of these structures relies on two different vibration states of a resonator as the logical values 1 and 0 to achieve reliable, low-power circuits 13 , 29 , 30 …”