Multi-layer processed probes for permittivity measurement

Jeong, EumMin; Jeong, Geunseok; Kim, Jung-Mu; Park, Jae‐Hyoung; Cho, Jeiwon; Cheon, Changyul; Kim, Yongkweon; Kwon, Youngwoo

doi:10.1109/mwsym.2004.1338955

Cited by 4 publications

(2 citation statements)

References 3 publications

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“…The mounted silicon MEMS probe on the gold-coated brass jig is connected to the test cable of the VNA after calibrating the VNA. The probe itself is calibrated with three calibration materials, air, methanol and distilled water [8,9]. The permittivity of an arbitrary liquid can be obtained by immersing the probe in the liquid and measuring the corresponding reflection coefficients; and likewise, the complex permittivity of solid samples can be obtained by placing the tip of the probe in contact with the sample.…”

Section: Measurement Resultsmentioning

confidence: 99%

Silicon MEMS probe using a simple adhesive bonding process for permittivity measurement

Kim¹,

Oh²,

Yoon³

et al. 2005

J. Micromech. Microeng.

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We developed a silicon MEMS probe for permittivity measurements using an adhesive bonding process. Only two photolithographic masks are required to fabricate the probe, which can be implemented through simple bonding processes using silicon substrates and a benzo cyclo butene (BCB) adhesive layer. Undoped silicon substrates with thicknesses of 300 µm are used as the dielectric layers of the proposed probe. BCB layers, which have good electrical properties at high frequencies as well as adhesive properties for the bonding process, play the role of bonding materials between the two silicon substrates. The length of the probe is 30 mm, and the aperture located at the tip of the probe is 1.1 mm × 0.62 mm. The permittivity of 0.5% saline was measured, and the results agreed with the values obtained through the Cole–Cole equation. To validate the feasibility of this probe for practical biological applications, we also performed in vivo measurements of the muscle, skin and blood of mice. Due to the simple fabrication process, the cost of the probe can be reduced in comparison with the previous micromachined probe (Kim et al 2005 J. Micromech. Microeng. 15 543–50) as well as the conventional laser machined probe. Low cost leads to disposability, which is an important factor for practical biomedical applications; and thus, coupled with the probe's capabilities of MMIC integration and CMOS compatibility, this probe has excellent potential in the field of microwave permittivity measurements.

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Section: Measurement Resultsmentioning

confidence: 99%

Silicon MEMS probe using a simple adhesive bonding process for permittivity measurement

Kim¹,

Oh²,

Yoon³

et al. 2005

J. Micromech. Microeng.

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“…The probe array is mounted on the brass jig and is fixed using silver epoxy [10]. The pin of the SMA connector is placed at the center of each microstrip line and each SMA connector and is fixed to the jig with screws (see figure 6).…”

Section: Measurement Configurationmentioning

confidence: 99%

In vitromeasurement using a MEMS probe array with five-strip lines for permittivity measurement

Kim

Baek

et al. 2005

J. Micromech. Microeng.

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This paper describes a single-aperture MEMS probe and a MEMS probe array for the measurement of biological properties. We designed and fabricated the single-aperture MEMS probe using surface micromachining and verified it by measuring the permittivity of a standard liquid before introducing the MEMS probe array. The actual aperture size of the single-aperture MEMS probe is only 390 µm × 80 µm, which is very small in comparison with the conventional laser-machined coaxial probe. In order to show the feasibility of the proposed single-aperture MEMS probe for permittivity measurements, we performed in vitro measurements of 0.9% saline. Once the single-aperture probe was verified, we proposed the concept of a probe array for biological measurements and experimentally showed the suitability of the MEMS probe array for biological applications through experiments using pork. The MEMS probe array consists of five microstrip feed lines, each of which is followed by open-ended strip lines, and the permittivity measurement of each port is separately performed through the use of a conventional multiport coaxial switch (Agilent, HP 87106 C), followed by a network analyzer (HP 8510 C). Through broadband measurements of 0.9% saline and pork using the MEMS probe array, we were able to discriminate the muscle and fat of pork through just one contact by placing the MEMS probe array on the boundary of muscle and fat. This newly proposed MEMS probe array has great potential in terms of disposability, low cost, integration with planar circuits and a short detection time for biological measurements.

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Microwave cancer diagnosis

Töpfer

Oberhammer

2017

Principles and Applications of RF/Microwave in Healthcare and Biosensing

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Multi-layer processed probes for permittivity measurement

Cited by 4 publications

References 3 publications

Silicon MEMS probe using a simple adhesive bonding process for permittivity measurement

Silicon MEMS probe using a simple adhesive bonding process for permittivity measurement

In vitromeasurement using a MEMS probe array with five-strip lines for permittivity measurement

Microwave cancer diagnosis

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