2011 International Electron Devices Meeting 2011
DOI: 10.1109/iedm.2011.6131651
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Multi-level 40nm WO<inf>X</inf> resistive memory with excellent reliability

Abstract: Fig.1 The cross sectional TEM image of the 40nm WOX ReRAM cell. The ring of TiNOX produced during RTO of W plug is non-conducting. Fig.3 RESET and SET voltages for WOX devices of various size. The switching voltages are independent of device size, an indication of filament forming/rupturing mechanism [4-5].Fig.4 RESET/SET current and initial resistance for various WOX devices.Switching current for 40nm device decreases drastically, while the initial state resistance increases as device scales. The smaller devi… Show more

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Cited by 36 publications
(18 citation statements)
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“…This device configuration allows for solving the sneak path problem. Recently, this behavior has also been observed in several single layer metal-oxides TaO x , HfO x and SrTiO 3 ReRAM devices with symmetrical electrode configuration [10][11][12], which is called complementary switching (CS). CS devices can be implemented into passive crossbar array without the selector device and allows for logic-in-memory applications [13,14].…”
Section: Introductionmentioning
confidence: 86%
“…This device configuration allows for solving the sneak path problem. Recently, this behavior has also been observed in several single layer metal-oxides TaO x , HfO x and SrTiO 3 ReRAM devices with symmetrical electrode configuration [10][11][12], which is called complementary switching (CS). CS devices can be implemented into passive crossbar array without the selector device and allows for logic-in-memory applications [13,14].…”
Section: Introductionmentioning
confidence: 86%
“…Many ReRAM material systems, such as TiOx [18], HfOx [8], WOx [1], TaOx [9], CuO [16], and ZrOx [11] were reported to be capable of MLC operation. Table 5 summarizes the state-of-the-art MLC ReRAM metrics in different ReRAM technologies.…”
Section: Trade-offs In Materials Selectionmentioning
confidence: 99%
“…As a 3D non-volatile memory technology, RRAM is attractive and much investigated in the recent decade [1][2][3][4][5]10]. For future 3D-stackable 4F 2 memory array applications, a selector device with high current density and high selectivity is required.…”
Section: Introductionmentioning
confidence: 99%