“…In recent years the rapid expansion in wireless communications has led to emerging applications at millimeter-wave frequencies, such as satellite transmission at 35 GHz, short-range communications, wireless communications systems, and local area networks (WLAN's) at 60 GHz or vehicular collision avoidance radar at 77 GHz. Micromachined devices operating at millimeter-wave frequencies are aimed to be miniature components with high performance, these include EFAB TM [1, 2], PolyStrata TM [3, 4], and SU-8 technology [5, 6]. EFAB TM and PolyStrata TM technologies involve multiple thin layer depositions to achieve tall structures.…”