Multi-probe method for straightness profile measurement based on least uncertainty propagation (1st report)

Okuyama, Eiki

doi:10.1016/j.precisioneng.2009.01.009

Cited by 16 publications

(12 citation statements)

References 5 publications

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“…When the cross-axis motion is ignorable, the separation should be performed by k p = 0. Furthermore, the separation technique of straightness from crossaxis motion using two sensors [8] is useful.…”

Section: Methodsmentioning

confidence: 99%

“…Recently, this author proposed a novel software datum based on least uncertainty propagation [8]. The proposed two-point method consists of a weighed addition and inverse filtering, and can reduce the uncertainty of the estimated surface profile by choosing suitable weights for the weighted addition.…”

Section: Introductionmentioning

confidence: 99%

“…Based on this information, the proposed method considers the cross-axis translational motion and random error of the sensor at Ref. [8]. However, the proposed method can possibly eliminate the pitch motion using the weighting addition.…”

Section: Introductionmentioning

confidence: 99%

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Multi-probe method for straightness profile measurement based on least uncertainty propagation (2nd report)—Two-point method considering cross-axis translational motion, pitch motion and sensor's random error

Okuyama

2010

Precision Engineering

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Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Multi-probe method for straightness profile measurement based on least uncertainty propagation (2nd report)—Two-point method considering cross-axis translational motion, pitch motion and sensor's random error

Okuyama

2010

Precision Engineering

Self Cite

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“…The reconstruction profiles are denoted Y f (x i ) and Y g (x i ), and using an integration process, the values of the reconstruction points are obtained by integrating the differential values in Equations (5) and (6):…”

Section: The Four-probe Systemmentioning

confidence: 99%

“…Several multi-probe methods were developed to remove the influence of reference errors. The two-point method can eliminate the straightness error of the measurement reference [1][2][3][4][5]. Besides, the yaw error of the measuring device during scanning also affects the reconstruction result.…”

Section: Introductionmentioning

confidence: 99%

A Four-Probe Method Using Different Probe Spacings for Measurement and Exact Reconstruction of Parallel Profiles

et al. 2019

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To realize the measurement and exact reconstruction of a pair of parallel profiles, a new scanning method using four displacement sensors as probes and different probe spacings has been invented with the advantage of preventing data processing error. The measuring device is placed between the measured objects and moved by a scanning stage to collect measurement data of both measured profiles. Considering many existing methods, the high lateral resolution of the reconstruction result and the rejection of the data processing error cannot always be achieved at the same time. When the measured profiles are in the short wavelength range, data processing errors are often on the same order of magnitude as the height difference of the measured profiles. The new method can eliminate both the straightness error of the measurement reference and the data processing error. The exact reconstruction retaining the high lateral resolution and without data processing error can be realized by rational position arrangement of sensors and corresponding processing method of the measurement data. The new method possesses the following advantages: (i) achievement of the exact reconstruction without data processing error; (ii) high lateral resolution not limited by probe spacing; (iii) concise operation without zero calibration of probes; and (iv) suitability for on-machine measurement. The feasibility and advantages of the new method were demonstrated by theoretical analyses, simulations, and experimental results.

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Application of the HHT Method to the Non-contact Thickness Measurement of an Axially Moving Thin Plate

Xia

et al. 2016

J. Inst. Eng. India Ser. C

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Non-contact thickness measuring systems can be found in a wide spectrum of technologies. In this paper, Hilbert-Huang transform method is used to analyze the real time signals of a measuring system which includes two round conveyor strings carrying a thin plate, a solar wafer as a sample under test. The vibrations of moving strings and the plate, which are sensitive to moving speed and initial tension in the string, are introduced briefly; the relevant analyses should be helpful for the system design. Using EMD-based time-domain filtering and complementary method, thickness variations and error bands are estimated for different cases. The results show that HHT method as an adaptive time-frequency method, should be potential in measurement engineering applications.

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Multi-probe method for straightness profile measurement based on least uncertainty propagation (1st report)

Cited by 16 publications

References 5 publications

Multi-probe method for straightness profile measurement based on least uncertainty propagation (2nd report)—Two-point method considering cross-axis translational motion, pitch motion and sensor's random error

Multi-probe method for straightness profile measurement based on least uncertainty propagation (2nd report)—Two-point method considering cross-axis translational motion, pitch motion and sensor's random error

A Four-Probe Method Using Different Probe Spacings for Measurement and Exact Reconstruction of Parallel Profiles

Application of the HHT Method to the Non-contact Thickness Measurement of an Axially Moving Thin Plate

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