Multi-range silicon micromachined flow sensor

Sabaté, N.; Santander, J.; Fonseca, L.; Gràcia, I.; Cané, C.

doi:10.1016/j.sna.2003.10.068

Cited by 120 publications

(75 citation statements)

References 12 publications

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“…Nickel resistors have been used for flow sensing due to their high TCR ( Figure 6) [40,41]. Kaanta et al used Cr/Ni resistors over a suspended silicon nitride membrane to create an array of flow sensors for micro-gas chromatography systems [5].…”

Section: Thermoresistivementioning

confidence: 99%

Micromachined Thermal Flow Sensors—A Review

2012

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Microfabrication has greatly matured and proliferated in use amongst many disciplines. There has been great interest in micromachined flow sensors due to the benefits of miniaturization: low cost, small device footprint, low power consumption, greater sensitivity, integration with on-chip circuitry, etc. This paper reviews the theory of thermal flow sensing and the different configurations and operation modes available. Material properties relevant to micromachined thermal flow sensing and selection criteria are also presented. Finally, recent applications of micromachined thermal flow sensors are presented. Detailed tables of the reviewed devices are included.

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Section: Thermoresistivementioning

confidence: 99%

Micromachined Thermal Flow Sensors—A Review

2012

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“…Although differential temperature flow sensors have been widely investigated [1][2][3][4][5][6], very few works have been devoted to find the impact of the sensor structure and dimensions on the key figures of merit of the devices [14][15][16][17][18][19][20]. Fluid dynamic simulations provide useful indications on particular aspects of the sensor operation, but are unable to embrace the whole transduction process, involving different physical domains that altogether contribute to the sensor performance.…”

Section: Open Accessmentioning

confidence: 99%

“…The basic operating principle of the sensor is simple: as the flow progressively increases, heat transfer in the downwind direction increases as well, producing a temperature difference that is sensed by the thermopiles. The typical configuration includes a single heater whereas multi-heater structures can be used to perform particular functions [17,[22][23][24] or simply extend the effective heater area with no adverse consequences on the etching time required to release the suspending membranes. Possible alternatives to the structure shown in Figure 1(a) are often used.…”

Section: Description Of the Sensor Structure And Main Performance Parmentioning

confidence: 99%

Design Issues for Low Power Integrated Thermal Flow Sensors with Ultra-Wide Dynamic Range and Low Insertion Loss

Bruschi

Piotto

2012

Micromachines

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Flow sensors are the key elements in most systems for monitoring and controlling fluid flows. With the introduction of MEMS thermal flow sensors, unprecedented performances, such as ultra wide measurement ranges, low power consumptions and extreme miniaturization, have been achieved, although several critical issues have still to be solved. In this work, a systematic approach to the design of integrated thermal flow sensors, with specification of resolution, dynamic range, power consumption and pressure insertion loss is proposed. All the critical components of the sensors, namely thermal microstructure, package and read-out interface are examined, showing their impact on the sensor performance and indicating effective optimization strategies. The proposed design procedures are supported by experiments performed using a recently developed test chip, including several different sensing structures and a flexible electronic interface.

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“…This is confirmed by numerous and interesting works in the eighties and nineties, which presented several flow sensors with various principles of measurement and performances [17,[21][22][23][24][25]. During the last decade the interest of the scientific community is still growing and some works with valuable peculiarities (e.g., multi-range sensors to facilitate the measurement of both low and high gas velocity, very low power consumption sensors, miniaturized sensors) have been reported [26][27][28][29]. For example Glaninger et al fabricated a thermal flow sensor using a thin film germanium thermistor with a wide range of measurement (±0.01 m·s ) and a response time of less than 20 ms [30].…”

Section: Thermal Flow Sensorsmentioning

confidence: 79%

Micromachined Flow Sensors in Biomedical Applications

2012

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Application fields of micromachined devices are growing very rapidly due to the continuous improvement of three dimensional technologies of micro-fabrication. In particular, applications of micromachined sensors to monitor gas and liquid flows hold immense potential because of their valuable characteristics (e.g., low energy consumption, relatively good accuracy, the ability to measure very small flow, and small size). Moreover, the feedback provided by integrating microflow sensors to micro mass flow controllers is essential to deliver accurately set target small flows. This paper is a review of some application areas in the biomedical field of micromachined flow sensors, such as blood flow, respiratory monitoring, and drug delivery among others. Particular attention is dedicated to the description of the measurement principles utilized in early and current research. Finally, some observations about characteristics and issues of these devices are also reported.

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Multi-range silicon micromachined flow sensor

Cited by 120 publications

References 12 publications

Micromachined Thermal Flow Sensors—A Review

Micromachined Thermal Flow Sensors—A Review

Design Issues for Low Power Integrated Thermal Flow Sensors with Ultra-Wide Dynamic Range and Low Insertion Loss

Micromachined Flow Sensors in Biomedical Applications

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