2018
DOI: 10.1002/pssa.201800764
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Multi‐Well Sensor Platform Based on a Partially Etched Structure of a Light‐Addressable Potentiometric Sensor

Abstract: A multi‐well‐structured light‐addressable potentiometric sensor (LAPS) plate is developed for measuring a plurality of sample solutions on a single sensor plate. It is also capable of high‐resolution chemical imaging inside the well structure. It can be applied, for example, to quantification of metabolic activities and imaging of biological samples incubated in the well structure. A minimum pattern size of 20 µm line is visualized and a wider frequency bandwidth of up to 200 kHz for the sensor signal is obtai… Show more

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Cited by 2 publications
(4 citation statements)
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“…The thin substrate can be obtained through decreasing the thickness of the thick Si wafer with physical or chemical method, such as wet etching, ion etching, , etc. Nakao et al etch n-type Si with KOH to optimize LAPS, where the spatial resolution is improved to 10 μm by etching the n-type Si wafer with hundreds of micrometers thickness to 20 μm .…”
Section: Technology Of High-resolution Imaging For Lapsmentioning
confidence: 99%
See 3 more Smart Citations
“…The thin substrate can be obtained through decreasing the thickness of the thick Si wafer with physical or chemical method, such as wet etching, ion etching, , etc. Nakao et al etch n-type Si with KOH to optimize LAPS, where the spatial resolution is improved to 10 μm by etching the n-type Si wafer with hundreds of micrometers thickness to 20 μm .…”
Section: Technology Of High-resolution Imaging For Lapsmentioning
confidence: 99%
“…Compared with the 40 μm achieved in the frame region, spatial resolution measured in the etched region is improved to 20 μm. In subsequent research, LAPS with a multiwell sensor platform based on the same etching technology as that in ref is designed . As shown in Figure a, there are several etching wells with a depth of 100 μm as the measuring region in a sensor plate.…”
Section: Technology Of High-resolution Imaging For Lapsmentioning
confidence: 99%
See 2 more Smart Citations