Multidirectional flexible force sensors based on confined, self-adjusting carbon nanotube arrays

Lee, Jae Ik; Pyo, Soonjae; Kim, Min-Ook

doi:10.1088/1361-6528/aaa051

Cited by 21 publications

(15 citation statements)

References 40 publications

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“…Based on the FEA and experimental results, the relationship between the slopes of E 1-4 can be defined as follows: based in Eqs. (1)(2)(3)(4)(5)(6)(7)(8)(9), F x , F y , and F z can be expressed as follows:…”

Section: Results and Analysismentioning

confidence: 99%

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Polymer-based flexible and multi-directional tactile sensor with multiple NiCr piezoresistors

Pyo

Lee

Kim

et al. 2019

Micro and Nano Syst Lett

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A polymer-based tactile sensor with flexibility and multi-directional sensing capability is presented. The proposed sensor consists of a polydimethylsiloxane (PDMS) bump, a polyimide (PI) substrate, Cr/Au electrode lines for electrical connection, NiCr piezoresistors, and an SU-8 support structure. The sensing mechanism is based on piezoresistive effect, in which the resistance of NiCr changes under mechanical load. The PMDS bump positioned at the center of the sensor transfers an applied force to the PI film, and the piezoresistors are differently deformed depending on the magnitude and direction of the force. A diaphragm structure formed by the SU-8 support with a trench allows the piezoresistor to be effectively deformed. Simulation and experimental results confirm that magnitude and direction can be obtained from an arbitrarily applied force by comparing the change in resistance of each sensing element. Based on its compatibility with conventional microfabrication, the proposed sensor may be a promising candidate for a low-cost tactile sensing solution for human-machine interfaces.

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Section: Results and Analysismentioning

confidence: 99%

“…Multidirectional sensing capability over a wide range of forces is also an essential feature for precise and stable measurement. To meet these requirements, a variety of flexible tactile sensors based on various sensing mechanisms have been developed, including resistive [4], capacitive [5], and piezoelectric [6] types.…”

Section: Introductionmentioning

confidence: 99%

Polymer-based flexible and multi-directional tactile sensor with multiple NiCr piezoresistors

Pyo

Lee

Kim

et al. 2019

Micro and Nano Syst Lett

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“…By measuring and comparing the capacitance of the four sensing elements, the sensor could distinguish the direction of the applied force (Figure 6a). Triboelectric [89] and resistive sensors, [21,90] utilizing signals from arrays of electrodes, have also been proposed. As shown in Figure 6b, sensors based on four sets of facing CNTs differentiated the direction and magnitude of an applied force by measuring the resistance change according to the variation in the overlapped contact area between the CNT arrays.…”

Section: Multidirectional Force Detectionmentioning

confidence: 99%

Recent Progress in Flexible Tactile Sensors for Human‐Interactive Systems: From Sensors to Advanced Applications

et al. 2021

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detection; furthermore, mechanisms or devices to detect other stimuli, such as strain, temperature, and humidity, may be integrated. A tactile feedback system, integrated with a prosthetic hand, was demonstrated in 1974, [2] and since then, a variety of tactile sensors have been actively developed for use in various applications, such as touch screens and robotic hands. Flexible tactile sensors capable of measuring mechanical stimuli via physical contact have attracted significant attention in the field of human-interactive systems. The utilization of tactile information can complement vision and/or sound interaction and provide new functionalities. Recent advancements in micro/nanotechnology, material science, and information technology have resulted in the development of high-performance tactile sensors that reach and even surpass the tactile sensing ability of human skin. Here, important advances in flexible tactile sensors over recent years are summarized, from sensor designs to system-level applications. This review focuses on the representative strategies based on design and material configurations for improving key performance parameters including sensitivity, detection range/linearity, response time/hysteresis, spatial resolution/crosstalk, multidirectional force detection, and insensitivity to other stimuli. System-level integration for practical applications beyond conceptual prototypes and promising applications, such as artificial electronic skin for robotics and prosthetics, wearable controllers for electronics, and bidirectional communication tools, are also discussed. Finally, perspectives on issues regarding further advances are provided.

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“…To solve this problem, self-powered sensors [12] can be developed by taking advantage of triboelectric, piezoelectric [13,14], and pyroelectric [15] effects. Through the stimulation of environmental changes such as external mechanical vibration or pressure, the corresponding electrical signals are generated through sensitive materials [16] to achieve tactile perception. In 2006, Wang Zhonglin et al first proposed a piezoelectric nanogenerator based on zinc oxide (ZnO) nanomaterials [17].…”

Section: Introductionmentioning

confidence: 99%

Triboelectric Self-Powered Three-Dimensional Tactile Sensor

Wang

Sun

Li³

et al. 2020

IEEE Access

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Three-dimensional tactile sensing in smart devices is witnessing an increasing demand. In this study, a three-dimensional tactile sensor is proposed according to the principle of triboelectricity by using polydimethylsiloxane (PDMS) and polyethylene oxide (PEO) films. Use of PDMS-ZnO composite films increases the output voltage of the electrodes. The sensor is designed with a cross beam-shaped pressure head to enable sensing normal forces in five directions. The working mechanism of the sensor is analyzed using the finite element method. The calculation results indicate a linear relationship between the output voltage and the force. The simulation results also demonstrate that the output voltage is linearly correlated with the applied force in the range of 1-30 N. Test results show that the sensor can sense the magnitude, frequency, and direction of the force as well as measure the duration of the force. The hardness of the object has a significant effect on the output voltage. Finally, the sensor is tested on a manipulator grasping an object to demonstrate its ability to sense the contact and sliding of the object.

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Multidirectional flexible force sensors based on confined, self-adjusting carbon nanotube arrays

Cited by 21 publications

References 40 publications

Polymer-based flexible and multi-directional tactile sensor with multiple NiCr piezoresistors

Polymer-based flexible and multi-directional tactile sensor with multiple NiCr piezoresistors

Recent Progress in Flexible Tactile Sensors for Human‐Interactive Systems: From Sensors to Advanced Applications

Triboelectric Self-Powered Three-Dimensional Tactile Sensor

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