“…In this case, coordinates of the points of surface relief, information about which is contained in each pixel of the photograph, were used to calculate the surface area between adjacent pixels in accordance with the method of triangulation. The appropriate software was developed, tested and applied in [8,9] for the realization of multifractal parametrization of the surface area of semiconductor film structures. In the present work, to describe the surface condition of samples, we used fractal analysis, not the MF as in [8,9].…”