“…Consequently, shrinking horizon NMPC was applied to the CVD model to find the optimal time-dependent T surf and X bulk that would achieve the requirements in R kMC and Gr kMC under uncertainty. Equation contains the NMPC scheme that maximizes Gr kMC throughout the production batch while satisfying the maximum acceptable final R kMC constraint: where t i represents the sampling times at the end of every sampling interval, n is the total number of sampling intervals, Δ t is the length of the sampling intervals, and f CVD is the CVD model subject to time-invariant uncertainty in the parameter E , which is the energy associated with a single bond between atoms in the thin film. ,,,,,, In addition, R * is the maximum tolerance on R kMC at the end of the batch, T min and T max are the minimum and maximum bounds on T surf , respectively, and X min and X max are the minimum and maximum bounds on X bulk , respectively. T 0 and X 0 are the initial conditions for T surf and X bulk , respectively, and Δ T and Δ X are the maximum allowed perturbations in T surf and X bulk between the adjacent sampling intervals.…”