We have used the FELIX infrared free-electron laser (FEL) at the FOM Institute for Plasma Physics in The Netherlands to enrich silicon isotopes by multiple-photon dissociation of the molecule Si 2 F 6 . The absorption of infrared radiation induces the reaction Si 2 F 6 f SiF 4 + SiF 2 . Much of the SiF 2 product further reacts to form additional SiF 4 . The Si 2 F 6 molecule has absorption bands in the 10, 12, and 25 µm spectral regions. FEL-induced reactions occurred in all three regions. The reaction fraction was highest for the stronger band in the 10 µm region. Reactions in all three bands were isotopically selective. Irradiation in the 10 µm region at 952 cm -1 gave an isotopic selectivity of 5.6 for 30 Si. For comparison, the published isotopic selectivity using a CO 2 laser in the same spectral region is in excess of 17. We attribute the lower selectivity obtained with an FEL to its longer macropulse, its broader spectral width, and differences in experimental procedure. FEL irradiation in the region of the 12 µm band produced isotopic selectivities in excess of 20 for 30 Si. Selective production of 28 Si was high in the 25 µm region. We used changes in the infrared spectra of the irradiated samples for all analyses of reaction and isotope enrichment except for a single confirmation of enrichment with a mass spectrometer.