Multiphysics research on electrochemical machining of micro holes with internal features

Liu, Guodong; Tong, Hao; Li, Yong; Zhong, Hao; Tan, Qifeng

doi:10.1007/s00170-020-05973-9

Cited by 16 publications

(5 citation statements)

References 27 publications

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“…In the turbulent bubble flow module, it is assumed that the gas produced by electrolysis obeys the ideal gas state equation and the current efficiency of the electrolyte is approximately constant. The relationship between electrolyte conductivity k, electrolyte temperature T and bubble rate β is summarized as the following formula [15]:…”

Section: Fig 1 Principle Of Electrochemical Machining Ecmmentioning

confidence: 99%

Multiphysics Numerical Simulation of the Transient Process in Electrochemical Machining

CHEN¹,

Li²,

LIU³

et al. 2022

mech

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To fully understand the electrochemical machining profile, a multi-physics coupling simulation model including flow-electric-temperature-structure field were established to analyze the corrosion process of the anode material and the change trend of temperature,hydrogen volume fraction, electrolyte conductivity and current density in the processing gap.The analysis results show that the temperature and hydrogen content gradually increase along the process direction.The current density and material removal showed a parabolic trend of the upper opening and the lower opening, respectively.The simulation of the different physical field changes in the electrochemical machining blade profile can not only better understand the complex physical phenomena in the machining, but also provide a theoretical basis for the selection of actual electrochemical machining parameters.

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Section: Fig 1 Principle Of Electrochemical Machining Ecmmentioning

confidence: 99%

Multiphysics Numerical Simulation of the Transient Process in Electrochemical Machining

CHEN¹,

Li²,

LIU³

et al. 2022

mech

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show abstract

“…The gap status detection methods, including voltage detection, current detection, and double layer capacitance detection [10][11][12], all assume that electrolyte properties are constant, which is inconsistent with the actual situation of large fluctuations in electrolyte properties and it is difficult to reflect gap status. According to theoretical and simulation research [13][14][15], electrolyte properties, such as temperature, conductivity, pH, flow rate, are related to the gap status. However, the existing sensors, which are large in size, are difficult to be arranged in the processing gap, and the electrolyte properties measured outside the processing gap are hard to reflect gap status.…”

Section: Introductionmentioning

confidence: 99%

Design and fabrication of a sensors-integrated silicon electrode for gap status monitoring in micro electrochemical machining

Zhu,

Liu,

et al. 2024

J. Micromech. Microeng.

Self Cite

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The monitoring of micro machining gap and the control of machining status within the gap have become bottlenecks in the research and development of micro electrochemical machining (ECM). General electrical signals are difficult to reflect the status of micro machining gap. Electrolytic products in micro machining gap are prone to precipitation and retention, leading to unstable material removal process. Micro ECM urgently requires gap status monitoring and feedback control. To realize gap status monitoring, a sensors-integrated silicon electrode, with a micro temperature sensor and a micro conductivity sensor on the silicon electrode near-front sidewall, is proposed innovatively in this study. Based on bulk silicon process and electroplating process, sensors-integrated silicon electrodes are designed and fabricated. Based on the signal processing system built for the temperature and conductivity sensor, the temperature and conductivity detection functions are verified and the sensors are calibrated. Micro ECM experiments with sensors-integrated silicon electrodes are carried out and micro holes with 200 μm depth are machined. For the conductivity sensor on the sensors-integrated silicon electrode, due to the affection of electrolytic environment, the function surface is contaminated and damaged, and the structural design needs to be further improved. For the temperature sensor, it is not affected by the electrolytic environment due to insulation-film’s protection, and reliable temperature monitoring is achieved in micro ECM. The detection results indicate that the temperature inside the machining gap has increased by 20 ℃ due to the electrochemical thermal effect and resistance thermal effect in micro ECM, and the temperature shows an increasing trend while machining depth increasing. The feasibility of process monitoring with sensors-integrated silicon electrode in micro ECM is preliminarily verified.

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“…Hundreds of microholes (usually tens of microns in diameter) are generally distributed on the nozzle board of the inkjet print head [4]. The mainstream microhole machining methods mainly include mechanical processing [5], electrochemical machining [6,7], micro-EDM [8], and laser machining [9]. Yun et al [10] machined straight-wall microholes with a depth-to-diameter ratio of 1:1 on 100µm, 50µm, and 25µm thick copper and stainless steel plates, respectively.…”

Section: Introductionmentioning

confidence: 99%

Picosecond Laser Trepan Drilling of Vertical Sidewalls Micro-Holes for 631 Stainless Steel

Gu¹,

He²,

Fu³

et al. 2022

SSRN Journal

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Multiphysics research on electrochemical machining of micro holes with internal features

Cited by 16 publications

References 27 publications

Multiphysics Numerical Simulation of the Transient Process in Electrochemical Machining

Multiphysics Numerical Simulation of the Transient Process in Electrochemical Machining

Design and fabrication of a sensors-integrated silicon electrode for gap status monitoring in micro electrochemical machining

Picosecond Laser Trepan Drilling of Vertical Sidewalls Micro-Holes for 631 Stainless Steel

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