Multiple-Patterning Nanosphere Lithography for Fabricating Periodic Three-Dimensional Hierarchical Nanostructures

Xu, Xiaobin; Yang, Qing; Wattanatorn, Natcha; Zhao, Chuanzhen; Chiang, Naihao; Jonas, Steven J.; Weiss, Paul S.

doi:10.1021/acsnano.7b05472

Cited by 94 publications

(81 citation statements)

References 49 publications

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“…Depositing different sizes of colloidal nanoparticle onto the same substrate allows for more complex pattern formation, a process which has been used to fabricate arrays of periodically spaced nanowires with two different diameters . Combining multiple patterns steps allows more complex structures to be created, including hollow silicon nanotubes . Another related technique is block copolymer micelle lithography, which uses the deposition of metal ion core micelles on a substrate, followed by dry etching, to define a pattern …”

Section: Fabrication Techniquesmentioning

confidence: 99%

High‐Aspect‐Ratio Nanostructured Surfaces as Biological Metamaterials

et al. 2020

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Materials patterned with high‐aspect‐ratio nanostructures have features on similar length scales to cellular components. These surfaces are an extreme topography on the cellular level and have become useful tools for perturbing and sensing the cellular environment. Motivation comes from the ability of high‐aspect‐ratio nanostructures to deliver cargoes into cells and tissues, access the intracellular environment, and control cell behavior. These structures directly perturb cells' ability to sense and respond to external forces, influencing cell fate, and enabling new mechanistic studies. Through careful design of their nanoscale structure, these systems act as biological metamaterials, eliciting unusual biological responses. While predominantly used to interface eukaryotic cells, there is growing interest in nonanimal and prokaryotic cell interfacing. Both experimental and theoretical studies have attempted to develop a mechanistic understanding for the observed behaviors, predominantly focusing on the cell–nanostructure interface. This review considers how high‐aspect‐ratio nanostructured surfaces are used to both stimulate and sense biological systems.

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Section: Fabrication Techniquesmentioning

confidence: 99%

High‐Aspect‐Ratio Nanostructured Surfaces as Biological Metamaterials

et al. 2020

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“…Integrated with other advanced fabrication methods, such as RIE, metal‐assisted chemical etching (MaCE), and so on, the self‐assembled PS MCCs can be used as templates to fabricate various large‐scale nanostructure arrays, which show great potential applications in many fields . Figure exhibits several typical nanostructure arrays those are fabricated by using the self‐assembled PS MCCs as templates.…”

Section: Resultsmentioning

confidence: 99%

Interfacial Capillary‐Force‐Driven Self‐Assembly of Monolayer Colloidal Crystals for Supersensitive Plasmonic Sensors

Wang

Chen

et al. 2020

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Colloidal lithography technology based on monolayer colloidal crystals (MCCs) is considered as an outstanding candidate for fabricating large‐area patterned functional nanostructures and devices. Although many efforts have been devoted to achieve various novel applicatons, the quality of MCCs, a key factor for the controllability and reproducibility of the patterned nanostructures, is often overlooked. In this work, an interfacial capillary‐force‐driven self‐assembly strategy (ICFDS) is designed to realize a high‐quality and highly‐ordered hexagonal monolayer MCCs array by resorting the capillary effect of the interfacial water film at substrate surface as well as controlling the zeta potential of the polystyrene particles. Compared with the conventional self‐assembly method, this approach can realize the reself‐assembly process on the substrate surface with few colloidal aggregates, vacancy, and crystal boundary defects. Furthermore, various typical large‐scale nanostructure arrays are achieved by combining reactive ion etching, metal‐assisted chemical etching, and so forth. Specifically, benefiting from the as‐fabricated high‐quality 2D hexagonal colloidal crystals, the surface plasmon resonance (SPR) sensors achieve an excellent refractive index sensitivity value of 3497 nm RIU−1, which is competent for detecting bovine serum albumin with an ultralow concentration of 10−8 m. This work opens a window to prepare high‐quality MCCs for more potential applications.

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“…Fig. 4a is based on photolithography of nano-microspheres combined with metal-assisted chemical etching technology to prepare a highly ordered hollow structure silicon nanorod array [66]. The corresponding SEM images can be seen from Fig.…”

Section: Controllable Etching Assisted By Monolayer Colloidal Crystalsmentioning

confidence: 99%

Recent progress in periodic patterning fabricated by self-assembly of colloidal spheres for optical applications

Liu

Zhang

et al. 2020

Sci. China Mater.

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Colloidal crystals are periodically ordered arrays of monodisperse colloidal particles which represent a new class of self-assembled materials showing potential applications in many fields. Two-dimensional graphic nanostructures based on colloidal crystals have inherent periodicity from tens of nanometers to several micrometers, which gives them rich and interesting optical properties. This article presents a comprehensive review about the current research activities on the self-assembly of colloidal spheres which is an effective strategy for fabrication of various hierarchical and ordered nanostructures, with particular attention paid to the unique properties and applications of the colloidal crystal-based nanostructures. Three main aspects are elaborated: a) controllable self-assembly of colloidal crystals; b) the functions of the obtained colloidal spheres acting as the patterned mask for successive construction of numerous nanostructures; c) the novel properties and promising optical applications of the patterned nanostructures in various domains, such as plasmonic-related fields, antireflection, photonic crystals, photocatalysis and electronic devices. After that, the current challenges and future perspectives in this area are provided. This review aims to inspire more ingenious designs and exciting research for manufacturing nanostructures utilizing colloidal self-assembly.

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Multiple-Patterning Nanosphere Lithography for Fabricating Periodic Three-Dimensional Hierarchical Nanostructures

Cited by 94 publications

References 49 publications

High‐Aspect‐Ratio Nanostructured Surfaces as Biological Metamaterials

High‐Aspect‐Ratio Nanostructured Surfaces as Biological Metamaterials

Interfacial Capillary‐Force‐Driven Self‐Assembly of Monolayer Colloidal Crystals for Supersensitive Plasmonic Sensors

Recent progress in periodic patterning fabricated by self-assembly of colloidal spheres for optical applications

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