Multiscale Analyses of Surface Failure Mechanism of Single-Crystal Silicon during Micro-Milling Process

Bai, Jinxuan; Bai, Qingshun; Tong, Zhen

doi:10.3390/ma10121424

Cited by 9 publications

(4 citation statements)

References 42 publications

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“…It was concluded that these parameters had a strong influence on the surface roughness of the micromachine surface. Jinxuan Bai et al [77] focused on the influencing parameters during the ductile mode micromachining in which it was concluded that vibration thrust force causes a brittle fracture and a smooth ductile cutting is achieved by smooth thrust force. Ugur Koklu and Gültekin Basmaci [78] focused on the effect of different tool path strategies with different cooling conditions on cutting force during micromilling.…”

Section: Introductionmentioning

confidence: 99%

Effect of Tool Coating and Cutting Parameters on Surface Roughness and Burr Formation during Micromilling of Inconel 718

Atif

Gupta

Mikołajczyk

et al. 2021

Metals

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Surface roughness and burr formation are among the most important surface quality metrics which determine the quality of the fabricated parts. High precision machined microparts with complex features require micromachining process to achieve the desired yet stringent surface finish and dimensional accuracy. In this research, the effect of cutting speed (m/min), feed rate (µm/tooth), depth of cut (µm) and three types of tool coating (AlTiN, nACo and TiSiN) were analyzed to study their effect on surface roughness and burr formation during the micromachining of Inconel 718. The analysis was carried out using an optical profilometer, scanning electron microscope and statistical technique. Machining tests were performed at low speed with a feed rate (µm/tooth) below the cutting-edge radius for 10 mm cutting length using a carbide tool of 0.5 mm diameter on a CNC milling machine. From this research, it was determined that the depth of cut was the main factor affecting burr formation, while cutting velocity was the main factor affecting the surface roughness. In addition, cutting tool coating did not significantly affect either surface roughness or burr formation due to the difference in coefficient of friction. The types of burr formed during micromilling of Inconel 718 were mainly influenced by the depth of cut and feed rate (µm/tooth) and were not affected by the cutting velocity. It was also concluded that the results for the surface finish at low-speed machining are comparable to that of transition and high-speed machining, while the burr width found during confirmation experiments at low-speed machining was also within an acceptable range.

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Section: Introductionmentioning

confidence: 99%

Effect of Tool Coating and Cutting Parameters on Surface Roughness and Burr Formation during Micromilling of Inconel 718

Atif

Gupta

Mikołajczyk

et al. 2021

Metals

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“…Instead, if processing titanium alloy Ti-6Al-4V with large diameter tools, the feed force would be primary and the tool failure is mainly caused the wear in the rake face of cutter. In particular, varying rake angle played a critical part in the formation of chips and influenced the shape-structure and amplitude of thrust force, which has been proved closely relation with finished surface performance by Bai et al [20]. In Fig.…”

Section: Wear Mechanism Of Machining Toolmentioning

confidence: 83%

Experimental and multiscale numerical investigation of wear mechanism and cutting performance of polycrystalline diamond tools in micro-end milling of titanium alloy Ti-6Al-4V

Bai

Tong

2018

International Journal of Refractory Metals and Hard Materials

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The present study reports on experiments and numerical simulations carried out to determine the wear and cutting performance of different polycrystalline diamond (PCD) tools in micro-end milling titanium alloy. The influence of tool geometrical parameters on wear resistance and machined surface precision was discussed. Furthermore, subsurface microstructure alteration was employed as an important index for evaluating the cutting performance of PCD tools. A dislocation dynamics-based multiscale framework, which is capable of promulgating the potential mechanism of above alteration, was adopted to quantitatively predict the evolution behavior of subsurface damages layer during micro-cutting process. The results demonstrated that the tool nose, flank and rake wear were of major wear forms and inappropriate tool structural changes can further accelerate tool failure. A PCD tool with rake angle of 5°, clearance angle of 15°, tool cutting edge radius of 20 μm and PCD granularity of 10 μm has highest cutting performance among the tested tools. Using this cutting tool, a surface roughness of Ra = 75nm better than most previously reported value on titanium alloy Ti-6Al-4V was achieved. A mass of subsurface damages consisted of discrete dislocation configuration, parallel glide lines and persistent slip bands were found after machining. Particularly, small tool cutting edge radius, large rake as well as clearance angle contributed to reducing defects quantity and decreasing the thickness of subsurface damages layer.

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“…With the development of ultra-hard materials, different kinds of ultra-hard cutting tools such as diamond coated tools, polycrystalline diamond (PCD) tools, and cubic boron nitride (CBN) tools have been used. This makes it possible that materials with high hardness or brittleness, such as engineering ceramics [24,25], tungsten carbide [26,27], silicon [28] and pure tungsten [29] etc., can be directly machined in ductile mode by hard milling. Unlike pure cutting, in which the relative tool sharpness, known as RTS (the ratio of the uncut chip thickness to the cutting edge radius) should be ≥ 10.…”

Section: Introductionmentioning

confidence: 99%

Research on High Performance Milling of Engineering Ceramics from the Perspective of Cutting Variables Setting

et al. 2019

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The setting of cutting variables for precision milling of ceramics is important to both the machined surface quality and material removal rate (MRR). This work specifically aims at the performance of corner radius PCD (polycrystalline diamond) end mill in precision milling of zirconia ceramics with relatively big cutting parameters. The characteristics of the cutting zone in precision milling ceramics with corner radius end mill are analyzed. The relationships between the maximum uncut chip thickness (hmax) and the milling parameters including feed per tooth (fz), axial depth of cut (ap) and tool corner radius (rε) are discussed. Precision milling experiments with exploratory milling parameters that cause uncut chip thickness larger than the critical value were carried out. The material removal mechanism was also analyzed. According to the results, it is advisable to increase fz appropriately during precision milling ZrO2 ceramics with corner radius end mill. There is still a chance to obtain ductile processed surface, as long as the brittle failure area is controlled within a certain range. The appropriate increasing of ap, not only can prevent the brittle damage from affecting the machined surface, but also could increase the MRR. The milling force increases with increasing MRR, but the surface roughness can still be stabilized within a certain range.

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Multiscale Analyses of Surface Failure Mechanism of Single-Crystal Silicon during Micro-Milling Process

Cited by 9 publications

References 42 publications

Effect of Tool Coating and Cutting Parameters on Surface Roughness and Burr Formation during Micromilling of Inconel 718

Effect of Tool Coating and Cutting Parameters on Surface Roughness and Burr Formation during Micromilling of Inconel 718

Experimental and multiscale numerical investigation of wear mechanism and cutting performance of polycrystalline diamond tools in micro-end milling of titanium alloy Ti-6Al-4V

Research on High Performance Milling of Engineering Ceramics from the Perspective of Cutting Variables Setting

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