Source localization based on the hybrid time-difference-of-arrival (TDOA) and frequencydifference-of-arrival (FDOA) measurements from distributed sensors is an essential problem in wireless sensor networks (WSNs). In this paper, we mainly study the optimal sensor deployment and velocity configuration of UAV swarms mounted with TDOA and FDOA based sensors. Explicit solutions of optimal sensor deployment and velocity configuration are acquired in both static and movable source scenarios based on the Fisher information matrix (FIM). Both centralized and decentralized localization are explored to meet different types of localization methods. Path planning problem of UAV swarms in TDOA/FDOA localization is also studied with constraints. Simulations verify its efficiency with path planning in TDOA and FDOA localization. INDEX TERMS Time-difference-of-arrival (TDOA), frequency-difference-of-arrival (FDOA), sensor deployment, fisher information matrix, path planning.