Multiterm solution of the reactive space–time-dependent Boltzmann equation

Abstract

The effect of spatial gradients, whether associated with surfaces or otherwise, on charged particle phase-space distribution functions and transport properties is a long-standing problem in the kinetic theory of gases. This article first discusses the necessary ingredients for an accurate kinetic theory analysis of the space-time behavior of electrons in gases and compares the different approaches currently in use. We then focus upon the electrons in a radio-frequency discharge away from the walls, where gradients are weak, and point out that the fundamental kinetic theory of even the boundary-free problem still warrants more careful attention than has been given to it in much of the contemporary literature. We highlighted the importance of careful analysis by presenting results for the first comprehensive ''multiterm'' solution of Boltzmann's equation furnishing the complete set of hydrodynamic transport coefficients for electrons in an ac field undergoing ionization and attachment.

On the existence of transiently negative diffusion coefficients for electrons in gases inE×Bfields

“…This investigation was motivated by studies of the anomalous behaviour of the longitudinal diffusion coefficient D E 4 (diffusion along the electric field direction) under the action of RF electric fields [9][10][11][12]. Recently, Petrović and coworkers at Belgrade University extended their Monte Carlo simulations techniques to include the combined action of RF electric and magnetic fields [1].…”

Low-pressure nonequilibrium plasma for a top-down nanoprocess

“…A direct numerical procedure (DNP) of the Boltzmann equation was proposed to elucidate the temporal behavior of the rf electron swarm in real gases by Makabe and co-workers in the mid-1990s [16,17]. A multi-term theory of an rf electron swarm was developed by Robson and coworkers [18]. The historical development is found in the literature [4,5,19].…”