Nano-electric studies on advanced semiconductor devices by conductive AFM

Chen, Y. J.; Chan, S. C.; Liu, R.; Toh, S.L.; Ji, R.

doi:10.1109/ipfa.2017.8060085

Cited by 2 publications

(2 citation statements)

References 5 publications

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“…Note that the left-hand side of Equation 4 depends on the variable τ, whereas the right-hand side depends on t. Expressions such as the right-hand side of Equation 5 can be expanded with a Fourier cosine series using the modified Bessel functions of the first kind (of different orders) as the Fourier coefficients [33]: (6) We apply this expansion to our current equation and obtain: (7) In order to be able to more intuitively analyse the result, we take the Fourier transform of the series in Equation 7: (8) We will return to this expression in order to analyse and visualize it in the Results section.…”

Section: Case 1: Dynamic Noncontact Current Measurement With Ideal Simentioning

confidence: 99%

“…Conductive atomic force microscopy (C-AFM), a contact-mode technique, has been extensively utilized to investigate local electrical properties of nanoscale systems, such as organic solar cells [1][2][3][4][5][6][7], semiconductors [8][9][10], and metals [11][12][13]. C-AFM has been used to characterize local charge transport characteristics [4,6] and to obtain detailed information about local charge mobility [5,7].…”

Section: Introductionmentioning

confidence: 99%

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Current measurements in the intermittent-contact mode of atomic force microscopy using the Fourier method: a feasibility analysis

Uluutku

Solares

2020

Beilstein J. Nanotechnol.

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Atomic force microscopy (AFM) is an important tool for measuring a variety of nanoscale surface properties, such as topography, viscoelasticity, electrical potential and conductivity. Some of these properties are measured using contact methods (static contact or intermittent contact), while others are measured using noncontact methods. Some properties can be measured using different approaches. Conductivity, in particular, is mapped using the contact-mode method. However, this modality can be destructive to delicate samples, since it involves continuously dragging the cantilever tip on the surface during the raster scan, while a constant tip–sample force is applied. In this paper we discuss a possible approach to develop an intermittent-contact conductive AFM mode based on Fourier analysis, whereby the measured current response consists of higher harmonics of the cantilever oscillation frequency. Such an approach may enable the characterization of soft samples with less damage than contact-mode imaging. To explore its feasibility, we derive the analytical form of the tip–sample current that would be obtained for attractive (noncontact) and repulsive (intermittent-contact) dynamic AFM characterization, and compare it with results obtained from numerical simulations. Although significant instrumentation challenges are anticipated, the modelling results are promising and suggest that Fourier-based higher-harmonics current measurement may enable the development of a reliable intermittent-contact conductive AFM method.

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Section: Case 1: Dynamic Noncontact Current Measurement With Ideal Simentioning

confidence: 99%