Nanocomposite ceramic powder production by laser-induced gas-phase reactions

Borsella, E.; Botti, S.; Alexandrescu, R.; Morjan, I.; Dikonimos-Makris, T.; Giorgi, R.; Martelli, Stefano

doi:10.1016/0921-5093(93)90724-s

Cited by 11 publications

(5 citation statements)

References 6 publications

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“…24 Nonhydrogenated deposits with continuous composition between SiN 1.38 and SiC 0.85 were prepared from TMS-NH 3 -H 2 , either by chemical vapor deposition ͑CVD͒ at 1200°C 25 or by PACVD at 600°C. 26 Several papers concerning the microstructure of ultrafine particles 7,8,10,[13][14][15] or deposits, 16,17,19,21,22,25,26 suggest that promising features of ''SiCN'' would be due to more complicated Si, C, and N atomic chemical environments than in a mixture of pure Si 3 N 4 -SiC phases. The objective of the present work was to investigate the chemical bonding and the local order around the different atoms of thick amorphous SiC x N y deposits (0.03 р x/(x ϩ y) р 0.67) prepared by CVD at 1000-1200°C using TMS-NH 3 -H 2 .…”

Section: Introductionmentioning

confidence: 98%

“…Most of the studies deals with powders prepared by thermally activated [1][2][3][4][5] or laser-induced 6-8 decomposition of organosilazanes. Silicon carbonitride particles were also obtained by laser irradiation of different gas mixtures: SiH 4 -C 2 H 4 -NH 3 , 9-10 SiH 4 -͑CH 3 ͒ 2 NH, [11][12][13] SiH 4 -CH 3 NH 2 -NH 3 . 14,15 In comparison ''SiCN'' coatings have been less studied.…”

Section: Introductionmentioning

confidence: 99%

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Structural characterization of amorphous SiCxNy chemical vapor deposited coatings

Bendeddouche

Berjoan

Bêche³

et al. 1997

Journal of Applied Physics

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High Seebeck effects from conducting polymer: Poly(3,4-ethylenedioxythiophene):poly(styrenesulfonate) based thin-film device with hybrid metal/polymer/metal architecture APL: Org. Electron. Photonics 5, 238 (2012) High Seebeck effects from conducting polymer: Poly(3,4-ethylenedioxythiophene):poly(styrenesulfonate) based thin-film device with hybrid metal/polymer/metal architecture Appl. Phys. Lett. 101, 173304 (2012) Response to "Comment on 'Silver/silicon dioxide/silver sandwich films in the blue-to-red spectral regime with negative-real refractive index'" [Appl. Phys. Lett. 101, 156101 (2012)] Appl. Phys. Lett. 101, 156102 (2012) On the determination of the glass forming ability of AlxZr1−x alloys using molecular dynamics, Monte Carlo simulations, and classical thermodynamics J. Appl. Phys. 112, 073508 (2012) Enhanced photoanode properties of epitaxial Ti doped α-Fe2O3 (0001) thin films Appl.Chemical bonding and local order around the different atoms of thick amorphous SiC x N y deposits ͓0.03рx/(xϩy)р0.67͔ prepared with chemical vapor deposition at 1000-1200°C using TMS-NH 3 -H 2 have been investigated using x-ray photoelectron spectroscopy ͑XPS͒, Raman spectrometry, Fourier transform infrared spectrometry ͑FT-IR͒, electron energy loss spectroscopy ͑EELS͒ and 29 Si magic-angle spinning nuclear magnetic resonance spectrometry ͑MAS-NMR͒. XPS analyses have shown that the main bonds are Si-C, Si-N, and C-C, and have suggested the existence of C-N bonds. According to Raman analyses and complementary FT-IR absorption of thin films, the coatings are nonhydrogenated. Si, C and N atomic chemical environments are more complicated than in a mixture of pure Si 3 N 4 -SiC phases. The examination of the Si KL 2,3 L 2,3 line shapes recorded by XPS have allowed one to state the existence of Si(C 4Ϫn N n ) units. Mixed coordination shells around silicon have been confirmed by EELS analyses. Additionally, FT-IR reflection analyses have proved that Si is both bonded with N and C. Indirect indication has been obtained owing to the 29 Si MAS-NMR analyses of powders. Raman analyses have been conclusive to assume that C-C bonds correspond to a mixed sp 3 Ϫsp 2 carbon configuration linked with Si(C 4Ϫn N n ) tetrahedra with 0рnр4.

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Section: Introductionmentioning

confidence: 98%

Section: Introductionmentioning

confidence: 99%

Structural characterization of amorphous SiCxNy chemical vapor deposited coatings

Bendeddouche

Berjoan

Bêche³

et al. 1997

Journal of Applied Physics

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“…7 On an other hand, nanostructured materials can be fabricated if an ultrafine multielement powder method is used. Several teams have worked and are still working on this route, [8][9][10][11][12][13] mainly using the laser-pyrolysis process, but their investigations concern mixtures of non-miscible precursors. They did not realize an unique hybrid precursor containing metallic elements needed for sintering.…”

Section: Introductionmentioning

confidence: 99%

Synthesis of SiCNAl(O) pre-alloyed nanopowders by pyrolysis of an aluminosilazane aerosol

Salles

Foucaud

Laborde

et al. 2007

Journal of the European Ceramic Society

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“…In the case of nanoparticles, tungsten powders of 54 nm can be synthesized from WF 6 /H 2 /M (M = Ar, Kr, Ne, Xe) gas mixtures irradiated with an ArF excimer laser [134]. Moreover, ceramic Si-C-N nanometric powders can be obtained from laser-induced gas phase reactions of SiH 4 , amines and NH 3 [135,136]. The incorporation of Si-C-N powders with sizes of 25-30 nm into aluminum improves its tensile and creep properties considerably [137].…”

Section: Chemical Vapor Depositionmentioning

confidence: 99%

Nanocrystalline materials and coatings

Tjong

Chen

2004

Materials Science and Engineering: R: Reports

842

345

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In recent years, near-nano (submicron) and nanostructured materials have attracted increasingly more attention from the materials community. Nanocrystalline materials are characterized by a microstructural length or grain size of up to about 100 nm. Materials having grain size of $0.1 to 0.3 mm are classified as submicron materials. Nanocrystalline materials exhibit various shapes or forms, and possess unique chemical, physical or mechanical properties. When the grain size is below a critical value ($10-20 nm), more than 50 vol.% of atoms is associated with grain boundaries or interfacial boundaries. In this respect, dislocation pile-ups cannot form, and the Hall-Petch relationship for conventional coarse-grained materials is no longer valid. Therefore, grain boundaries play a major role in the deformation of nanocrystalline materials. Nanocrystalline materials exhibit creep and super plasticity at lower temperatures than conventional micro-grained counterparts. Similarly, plastic deformation of nanocrystalline coatings is considered to be associated with grain boundary sliding assisted by grain boundary diffusion or rotation. In this review paper, current developments in fabrication, microstructure, physical and mechanical properties of nanocrystalline materials and coatings will be addressed. Particular attention is paid to the properties of transition metal nitride nanocrystalline films formed by ion beam assisted deposition process. #

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Nanocomposite ceramic powder production by laser-induced gas-phase reactions

Cited by 11 publications

References 6 publications

Structural characterization of amorphous SiCxNy chemical vapor deposited coatings

Structural characterization of amorphous SiCxNy chemical vapor deposited coatings

Synthesis of SiCNAl(O) pre-alloyed nanopowders by pyrolysis of an aluminosilazane aerosol

Nanocrystalline materials and coatings

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