Nanocone formation on ion-bombarded InP surfaces

Kramczynski, Detlef; Gnaser, Hubert

doi:10.1016/j.apsusc.2015.07.156

Cited by 8 publications

(1 citation statement)

References 62 publications

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“…Unfortunately, the BH approach cannot explain the formation of further, cone-like (pillars), structures on irradiated multicomponent samples [31][32][33]. For multicomponent surfaces, the partial sputtering yields depend on the atomic masses and surface binding energies of the constituents [34].…”

Section: Introductionmentioning

confidence: 99%

Recent developments in ion beam-induced nanostructures on AIII-BV compound semiconductors

Trynkiewicz

Jany

Janas

2018

J. Phys.: Condens. Matter

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Ion-beam sputtering of two-component substrates constitutes an alternative route for the nanofabrication of 3D (three-dimensional) structures, such as quantum dots or nanowires with unique properties like a high degree of local ordering. To allow for feasibility in precision manufacturing, control and optimization it is necessary to completely understand all the phenomena behind the evolution of nanostructures. The formation and development during the ion irradiation of similar features has been extensively studied for almost a half of century, but only over the last few years have new results appeared, ones stimulating real progress within this field. In this paper we report on the growth of such 3D nanostructures after low energy ion-beam sputtering on specific materials belonging to the group of AIII-BV binary compound crystals. Special emphasis is given to the role of sample temperature (during irradiation or post-annealing) on the evolution of nanostructure patterns and their ordering. The formation of such systems will be explained as seen from a phenomenological perspective.

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