Nanocrystalline diamond photonics platform with high quality factor photonic crystal cavities

Checoury, X.; Néel, Delphine; Boucaud, P.; Gesset, C.; Girard, Hugues A.; Saada, S.; Bergonzo, P.

doi:10.1063/1.4764548

Cited by 42 publications

(36 citation statements)

References 30 publications

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“…By fitting the data with a line we can obtain the propagation loss as 5.3 ± 0.3 dB/mm, in good agreement with the loss obtained from the measurement of the ring resonators. The measured loss is a factor of five smaller than reported recently for polycrystalline diamond, even without surface polishing [19]. The results thus illustrate that waveguiding over millimeter distances is possible with our diamond substrates.…”

Section: Measurement Of the Propagation Loss With Long Waveguidesmentioning

confidence: 45%

Waferscale nanophotonic circuits made from diamond-on-insulator substrates

Rath¹,

Gruhler²,

Khasminskaya³

et al. 2013

Opt. Express

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Wide bandgap dielectrics are attractive materials for the fabrication of photonic devices because they allow broadband optical operation and do not suffer from free-carrier absorption. Here we show that polycrystalline diamond thin films deposited by chemical vapor deposition provide a promising platform for the realization of large scale integrated photonic circuits. We present a full suite of photonic components required for the investigation of on-chip devices, including input grating couplers, millimeter long nanophotonic waveguides and microcavities. In microring resonators we measure loaded optical quality factors up to 11,000. Corresponding propagation loss of 5dB/mm is also confirmed by measuring transmission through long waveguides.

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Section: Measurement Of the Propagation Loss With Long Waveguidesmentioning

confidence: 45%

Waferscale nanophotonic circuits made from diamond-on-insulator substrates

Rath¹,

Gruhler²,

Khasminskaya³

et al. 2013

Opt. Express

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“…These can be grown on foreign substrates (e. g. silicon, SiO 2 ) on a large scale and with sub-micrometer thickness. The film's surface can be smoothed using polishing to achieve an unprecedented value of 1.6 nm root mean square (RMS) [109] . Using such thin films and under-etching of the substrate material, photonic crystals suspended in air have been fabricated and displayed Q factors of around 600 [110] in the visible range and 2800 at 1.5 µm [109] .…”

Section: Figure 4 Examples Of Hybrid Approaches To Diamond Nanophotonmentioning

confidence: 99%

Diamond Nanophotonics

Aharonovich

Neu

2014

Advanced Optical Materials

303

233

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“…The B-NCD thin films have been subject to a great deal of attention due to their outstanding properties, remarkable hardness, optical transparency in a broad wavelength [31,32], high thermal conductivity [33] as well as biocompatibility [34,35]. Unlike the rough polycrystalline films with grain sizes above 500 nm, NCD films with typical grain sizes and surface roughness of less than 100 nm are relatively smooth showing properties close to single crystal diamond [36].…”

Section: Introductionmentioning

confidence: 99%

Fabrication and characterization of boron-doped nanocrystalline diamond-coated MEMS probes

et al. 2016

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Fabrication processes of thin boron-doped nanocrystalline diamond (B-NCD) films on silicon-based micro-and nano-electromechanical structures have been investigated. B-NCD films were deposited using microwave plasma assisted chemical vapour deposition method. The variation in B-NCD morphology, structure and optical parameters was particularly investigated. The use of truncated cone-shaped substrate holder enabled to grow thin fully encapsulated nanocrystalline diamond film with a thickness of approx. 60 nm and RMS roughness of 17 nm. Raman spectra present the typical boron-doped nanocrystalline diamond line recorded at 1148 cm -1 . Moreover, the change in mechanical parameters of silicon cantilevers over-coated with boron-doped diamond films was investigated with laser vibrometer. The increase of resonance to frequency of over-coated cantilever is attributed to the change in spring constant caused by B-NCD coating. Topography and electrical parameters of boron-doped diamond films were investigated by tapping mode AFM and electrical mode of AFM-Kelvin probe force microscopy (KPFM). The crystallite-grain size was recorded at 153 and 238 nm for boron-doped film and undoped, respectively. Based on the contact potential difference data from the KPFM measurements, the work function of diamond layers was estimated. For the undoped diamond films, average CPD of 650 mV and for borondoped layer 155 mV were achieved. Based on CPD values, the values of work functions were calculated as 4.65 and 5.15 eV for doped and undoped diamond film, respectively. Boron doping increases the carrier density and the conductivity of the material and, consequently, the Fermi level.

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Nanocrystalline diamond photonics platform with high quality factor photonic crystal cavities

Cited by 42 publications

References 30 publications

Waferscale nanophotonic circuits made from diamond-on-insulator substrates

Waferscale nanophotonic circuits made from diamond-on-insulator substrates

Diamond Nanophotonics

Fabrication and characterization of boron-doped nanocrystalline diamond-coated MEMS probes

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