2005
DOI: 10.1016/j.diamond.2005.08.068
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Nanodiamond planar lateral field emission diode

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Cited by 40 publications
(21 citation statements)
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“…[4] Furthermore, the conical structures could serve as good templates for producing nanodiamond tip arrays, which could be made into diamond nanoelectrode ensembles easily by the simple polymer-masking technique described in our earlier work. [4] Also, the nanodiamond tip arrays could find interest in functionalized biosensor [5] and field emission [6] applications.…”
Section: Introductionmentioning
confidence: 99%
“…[4] Furthermore, the conical structures could serve as good templates for producing nanodiamond tip arrays, which could be made into diamond nanoelectrode ensembles easily by the simple polymer-masking technique described in our earlier work. [4] Also, the nanodiamond tip arrays could find interest in functionalized biosensor [5] and field emission [6] applications.…”
Section: Introductionmentioning
confidence: 99%
“…We have developed a fabrication technique, paralleling standard IC process technology, for monolithic nanodiamond lateral devices, employing a reactive ion etchassisted micropatterning technique for the material. Having demonstrated the performance of the lateral diode previously, [12][13][14] this work describes the design, fabrication process, and field emission characteristics of the nanodiamond lateral vacuum device, operating in triode mode.…”
mentioning
confidence: 99%
“…The lateral device processing approach has been reported in detail in previous publications (Subramanian et al 2005b(Subramanian et al , 2006c. A nitrogen-incorporated nanodiamond film grown by CH 4 /H 2 /N 2 microwave plasma-enhanced CVD on a silicon-on-insulator (SOI) wafer is micropatterned using a pure oxygen plasma chemistry reactive ion etch (RIE) in an inductively coupled plasma-RIE system.…”
Section: (B ) Experimentalmentioning
confidence: 99%
“…The lateral device, in a diode configuration, has uniform arrays of nanodiamond fingered emitters with a high aspect-ratio geometry forming the cathode, in close proximity with the anode structure, with equal interelectrode spacing distribution over a large area. The nanodiamond lateral finger array FE diodes have a low voltage and a potential for a high emission current operation (Subramanian et al 2005b).…”
Section: The Nanodiamond Lateral Field Emission Device (A ) Introductionmentioning
confidence: 99%