2015
DOI: 10.1109/tim.2015.2395551
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Nanodisplacement Measurements of Piezoelectric Flextensional Actuators Using a New Interferometry Homodyne Method

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Cited by 15 publications
(7 citation statements)
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“…If the AAF frequency response is considered, the correct form of (6) and (10) can be expressed as (15) and (16) …”
Section: Gain Feedback Controlmentioning
confidence: 99%
“…If the AAF frequency response is considered, the correct form of (6) and (10) can be expressed as (15) and (16) …”
Section: Gain Feedback Controlmentioning
confidence: 99%
“…(18) can be avoided by observing maximum of the spectrum magnitude for each frequency nf 0 (n 1; 2; 3; …). According to [7], when the maximum is switching between 3f 0 and 4f 0 by the random phase shift, then C is monotonic within a given limited range of 4.2 to 5.13. This is also convenient to adjust C to 4.44 from Eq.…”
Section: Research Articlementioning
confidence: 99%
“…ptical measurement techniques, e.g. optical interferometry, are nowadays popular in the field of surface texture measurement due to their fast measurement speed and high measurement resolution [1]- [3]. In comparison to the raster scanning style of tactile measurements, optical methods instantly acquiring raw data for producing profile/areal surfaces are more effective to determine the geometrical nature of surfaces without halting the manufacturing process.…”
Section: Introductionmentioning
confidence: 99%