2020
DOI: 10.3390/bios10080090
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Nanoelectrode Arrays Fabricated by Thermal Nanoimprint Lithography for Biosensing Application

Abstract: Electrochemical sensors are devices capable of detecting molecules and biomolecules in solutions and determining the concentration through direct electrical measurements. These systems can be miniaturized to a size less than 1 µm through the creation of small-size arrays of nanoelectrodes (NEA), offering advantages in terms of increased sensitivity and compactness. In this work, we present the fabrication of an electrochemical platform based on an array of nanoelectrodes (NEA) and its possible use for the dete… Show more

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Cited by 15 publications
(14 citation statements)
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“…Furthermore, among top-down lithography, electron beam lithography (EBL) showed the ability to create synthetic surfaces with sub-50 nm spatial resolution and a well-defined control of the topographical features to decorate the electrode with high-resolution nanostructures. 40 Graphene-based FETs were fabricated by the conventional Scotch-tape exfoliation process on SiO 2 /Si substrate, followed by standard EBL and metallization with 5/50 nm Cr/Au. 41 43 The S1-Ab were raised in-house 15 and covalently conjugated with graphene, using carbodiimide chemistry.…”
Section: Introductionmentioning
confidence: 99%
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“…Furthermore, among top-down lithography, electron beam lithography (EBL) showed the ability to create synthetic surfaces with sub-50 nm spatial resolution and a well-defined control of the topographical features to decorate the electrode with high-resolution nanostructures. 40 Graphene-based FETs were fabricated by the conventional Scotch-tape exfoliation process on SiO 2 /Si substrate, followed by standard EBL and metallization with 5/50 nm Cr/Au. 41 43 The S1-Ab were raised in-house 15 and covalently conjugated with graphene, using carbodiimide chemistry.…”
Section: Introductionmentioning
confidence: 99%
“…The major advantage of this FET sensor over other published FET devices is that, here, in-housed generated Spike S1 antibodies were used for the sensing, which reduces the overall cost of sensor fabrication. Furthermore, among top-down lithography, electron beam lithography (EBL) showed the ability to create synthetic surfaces with sub-50 nm spatial resolution and a well-defined control of the topographical features to decorate the electrode with high-resolution nanostructures . Graphene-based FETs were fabricated by the conventional Scotch-tape exfoliation process on SiO 2 /Si substrate, followed by standard EBL and metallization with 5/50 nm Cr/Au. The S1-Ab were raised in-house and covalently conjugated with graphene, using carbodiimide chemistry. , Interaction of S1-Ag with graphene-conjugated S1-Ab results in the redistribution of local doping, thus the change in resistance of graphene, which can rapidly be detected as an output as illustrated in Scheme .…”
Section: Introductionmentioning
confidence: 99%
“…The polycarbonate film was patterned by indenting the pillars in the PC, i.e., forcing the displacement of the polymer from the area of the pillars on the stamp during the NIL thermomechanical cycle. Details on the fabrication of the stamp are carefully described elsewhere [31] and summarized in Scheme S1 in Supplementary Material.…”
Section: Fabrication Of Nanoelectrodes Arraysmentioning
confidence: 99%
“…Arrays of nanoelectrodes were fabricated by NIL, applying to GC platelets the procedure described previously for BDD thin film electrodes [31]. Briefly, a polycarbonate film was spin-coated at 2000 rpm on a thick layer of GC prepared by pyrolysis of a polymeric photoresist.…”
Section: Fabrication Of Nanoelectrodes Arraysmentioning
confidence: 99%
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