2000
DOI: 10.1126/science.290.5496.1532
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Nanoelectromechanical Systems

Abstract: Nanoelectromechanical systems are evolving, with new scientific studies and technical applications emerging. Mechanical devices are shrinking in thickness and width to reduce mass, increase resonant frequency, and lower the force constants of these systems. Advances in the field include improvements in fabrication processes and new methods for actuating and detecting motion at the nanoscale. Lithographic approaches are capable of creating freestanding objects in silicon and other materials, with thickness and … Show more

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Cited by 1,433 publications
(962 citation statements)
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References 37 publications
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“…60 Computed counterparts do agree with to BNG structures with p multiple of 3, such as (1,1), (1,4) and (1,7). The nuclear relaxation effect is seen to be quite small in all cases if compared with the electronic one: it never counts more than 3.8% for the dominant C 11 constant, which occurs for the (1,1) BNG structure of highest BN concentration.…”
Section: Resultsmentioning
confidence: 72%
See 1 more Smart Citation
“…60 Computed counterparts do agree with to BNG structures with p multiple of 3, such as (1,1), (1,4) and (1,7). The nuclear relaxation effect is seen to be quite small in all cases if compared with the electronic one: it never counts more than 3.8% for the dominant C 11 constant, which occurs for the (1,1) BNG structure of highest BN concentration.…”
Section: Resultsmentioning
confidence: 72%
“…[1][2][3] A variety of NEMS devices has been successfully produced (nanosized switches, sensors, motors, energy harvesters, actuators, etc.) [4][5][6][7] which essentially rely on quantum-size effects.…”
Section: Introductionmentioning
confidence: 99%
“…[1][2][3][4] E-beam lithography typically involves applying, chemically transforming, and chemically dissolving a polymer resist. 5 The desire to decrease device size, to enhance the role of quantum mechanical device characteristics, and to pattern increasingly complex substrates requires new lithographic approaches to define nanometer scale structures.…”
mentioning
confidence: 99%
“…Blood losses from specimen collection, particularly in pediatric patients and those with many punctures, may be a cause of iatrogenic anemia and increased transfusion needs. Miniaturization is a technologic phenomenon that is rapidly occurring in a wide range of industries (10). In laboratories, the sizes of instruments and their analytic volume requirements have decreased considerably.…”
Section: Discussionmentioning
confidence: 99%