2002
DOI: 10.1063/1.1517400
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Nanofabrication of integrated magnetoelectronic devices using patterned self-assembled copolymer templates

Abstract: Articles you may be interested inTemplated germanium nanowire synthesis using oriented mesoporous organosilicate thin films Conventional lithographic exposure is used to selectively degrade regions of a self-assembled diblock copolymer film to obtain a honeycomblike nanoporous array template with arbitrary lateral design. Combined with other lithographic process steps, this enables the fabrication of arrays of nanostructures interfaced to electrical probes for device applications. To demonstrate, a unique magn… Show more

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Cited by 71 publications
(41 citation statements)
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“…[ [4,6] tracketched membranes, [10] and anodic alumina, [10] have already been developed for the fabrication of nanowire arrays. Among these templates, anodic alumina is widely used to fabricate nanowire arrays because of its chemical and mechanical stability and the possibility of producing ideally ordered pore configurations.…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…[ [4,6] tracketched membranes, [10] and anodic alumina, [10] have already been developed for the fabrication of nanowire arrays. Among these templates, anodic alumina is widely used to fabricate nanowire arrays because of its chemical and mechanical stability and the possibility of producing ideally ordered pore configurations.…”
Section: Methodsmentioning
confidence: 99%
“…One-dimensional structures, such as nanowires and nanotubes, have received considerable attention in recent years for their potential application in many fields. [1] Nanowire arrays are particularly attractive for high-density magnetic recording media, [2±4] sensors, [5,6] and thermoelectric devices.…”
Section: Methodsmentioning
confidence: 99%
“…The authors also showed that the cobalt nanowire arrays could be extended to other systems such as giant-magneto-resistance devices [202]. Cobalt hexagonal arrays of nanodots with long range order have been created using an asymmetric PS-b-PMMA copolymer in combination with a topographic guide (graphoepitaxy), where the surface was chemically modified with the PS-r-PMMA brush layer to induce preferential ordering.…”
Section: Metals Within Paa Mtfs and Bcps Templatesmentioning
confidence: 99%
“…High-density Bi 2 Te 3 NWs are predominantly synthesized by a number of template-assisted methods using track-etched membranes [20][21][22], diblock copolymers [23,24], or anodized aluminum oxide (AAO) templates [25,26]. Of these, AAO templates have found particularly widespread usage owing to the simplicity and flexibility of their fabrication methods.…”
Section: Introductionmentioning
confidence: 99%