Nanofluidic peristaltic pumps made from silica thin films

Stout, John M.; Baumgarten, Thomas E.; Stagg, Grant G.; Hawkins, Aaron R.

doi:10.1088/1361-6439/ab4cc9

Cited by 10 publications

(3 citation statements)

References 22 publications

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“…In the pump the fluid is pumped due to the peristaltic movement of the actuators. Peristalsis is a simple and reliable pumping method that is widely implemented in microfluidics using actuators of various types [48][49][50][51][52]. The actuators operate in the sequence shown in Figure 3a.…”

Section: Design Of the Pumpmentioning

confidence: 99%

A Peristaltic Micropump Based on the Fast Electrochemical Actuator: Design, Fabrication, and Preliminary Testing

et al. 2021

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Microfluidic devices providing an accurate delivery of fluids at required rates are of considerable interest, especially for the biomedical field. The progress is limited by the lack of micropumps, which are compact, have high performance, and are compatible with standard microfabrication. This paper describes a micropump based on a new driving principle. The pump contains three membrane actuators operating peristaltically. The actuators are driven by nanobubbles of hydrogen and oxygen, which are generated in the chamber by a series of short voltage pulses of alternating polarity applied to the electrodes. This process guaranties the response time of the actuators to be much shorter than that of any other electrochemical device. The main part of the pump has a size of about 3 mm, which is an order of magnitude smaller in comparison with conventional micropumps. The pump is fabricated in glass and silicon wafers using standard cleanroom processes. The channels are formed in SU-8 photoresist and the membrane is made of SiNx. The channels are sealed by two processes of bonding between SU-8 and SiNx. Functionality of the channels and membranes is demonstrated. A defect of electrodes related to the lift-off fabrication procedure did not allow a demonstration of the pumping process although a flow rate of 1.5 µl/min and dosage accuracy of 0.25 nl are expected. The working characteristics of the pump make it attractive for the use in portable drug delivery systems, but the fabrication technology must be improved.

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Section: Design Of the Pumpmentioning

confidence: 99%

A Peristaltic Micropump Based on the Fast Electrochemical Actuator: Design, Fabrication, and Preliminary Testing

et al. 2021

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“…For 2D nanochannels, passive and electrokinetic pumps have been reported. Meanwhile, due to technical difficulties in nanofabrication, only one mechanical pump has been reported that fits a 1D nanochannel . It remains challenging with current technologies to fabricate and integrate certain elements that control fluid precisely in nanochannels; however, nanofluidics is expected to overcome these technical challenges as microfluidics has overcome corresponding challenges in past decades.…”

Section: Fundamental Technologiesmentioning

confidence: 99%

Nanofluidic Devices and Applications for Biological Analyses

2020

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“… 16 Scientists use evaporation, 17 , 18 electroosmotic flow, 19 high voltage, 20 ions, 21 nanowires, 22 surface charge, 23 and even large HPLC pumps 24 to control the nanometer flow. Nanofluidic technology also needs microfluidic technology, such as temperature-controlled peristaltic pumps, 25 air-controlled valves, 26 microfluidics combined with membranes, 27 170 V silicon dioxide thin film deformable pumps, 28 and 4W ultrasonic drives. 29 Microfluidics and nanofluidics are two separate fields needing a bridge between them.…”

Section: Introductionmentioning

confidence: 99%