Nanograin crystalline transformation enhanced UV transparency of annealing refined indium tin oxide film

Hsu, Wei-Lun; Pai, Yi‐Hao; Meng, Fan-Shuen; C, Liu; Lin, Gong‐Ru

doi:10.1063/1.3147868

Cited by 16 publications

(15 citation statements)

References 19 publications

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“…4. The sheet resistances of the ITO thin films are strongly related to the amount of oxygen vacancies and microstructure [15]. The oxygen vacancies create maximum two free electrons per vacancy to the donor level through ionization, leading to an increase in conductivity.…”

Section: Resultsmentioning

confidence: 99%

Improvement of optical and electrical properties of ITO thin films by electro-annealing

Köseoğlu

Turkoglu

Kurt

et al. 2015

Vacuum

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a b s t r a c tThe effect of electro-annealing in vacuum and air on the optical and electrical properties of ITO thin films grown by large area DC magnetron sputtering was investigated. Moreover, the performances of the electro-annealed ITO thin films in vacuum and air were compared. Electro-annealing was performed by applying 0.75, 1.00, 1.25 and 1.50 A constant ac current to the ITO thin films. It was observed that the crystallinity of the films was better for the ITO thin films electro-annealed in vacuum. The changes in sheet resistance of electro-annealed ITO thin films with applied currents were detailed. The transmittance of the films increased for both electro-annealing in vacuum and air. A correlation between band-gap and resistivity for all of the electro-annealed thin films was observed.

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Section: Resultsmentioning

confidence: 99%

Improvement of optical and electrical properties of ITO thin films by electro-annealing

Köseoğlu

Turkoglu

Kurt

et al. 2015

Vacuum

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“…These results confirm that the annealing temperature below 500 C does not seriously affect the optical transmittance even though the crystallization of AYZO films is improved by increasing the annealing temperature. Conversely, the 325-nm and 405-nm transmittance of ITO films can be improved by 4 and 1.5 times, respectively, within the annealing temperature range of 400 C-500 C. The highest 325-nm transmittance of the ITO films was observed at the annealing temperature of 475 C. However, the 325-nm transmittance degrades to 28.5% when increasing the annealing temperature above 500 C. The crystallization of ITO films after high-temperature annealing is known to be detrimental to the UV transmittance [10]. Apparently, the comparisons have also shown that the AYZO exhibits a better transmittance that the ITO at wavelengths longer than 405 nm.…”

Section: Resultsmentioning

confidence: 83%

“…Nevertheless, the resistivity of ITO films increases to 7 10 cm by further increasing the annealing to 475 C or higher. In view of previous works, the resistivity of the AZO film with Al content of 7 at.% deposited by using the RF magnetron sputtering can be controlled below 4.7 10 cm, which has the transmittance up to 90% at visible wavelength regime [37]. In comparison with the AZO films, the AYZO film with lower donor content (Al: 0.7 wt.% and Yb: 0.5 wt.%) also achieves a similar resistivity of 3.…”

Section: Resultsmentioning

confidence: 99%

“…In comparison, the ITO needs a longer annealing time for a significant refinement to provide a higher transmittance. In particular, the ITO becomes less stable when varying the annealing temperature to below 400 C or beyond 500 C, and the high-temperature induced crystallization seriously affects on the UV-transmittance of the ITO film [10].…”

Section: Resultsmentioning

confidence: 99%

“…Among the applicable TCO candidates, the indium tin oxide (ITO) film is still the most reliable one up to now due to its excellent optical and electrical properties [10], [11]. Minami et al have deposited ITO film with In content of 50-90% at room temperature to make its resistivity as low as 4.5-5.5 10 cm [11].…”

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confidence: 99%

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Performance of Highly Transparent and Stable Zinc Oxide Co-Doped Thin-Film by Aluminum and Ytterbium

Cheng

Hsu

Lin

et al. 2014

J. Display Technol.

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The transparent and conductive zinc oxide co-doped by aluminum and ytterbium (AYZO) is demonstrated. The transmittance of AYZO films in visible region only changes by less than 1% due to the stability of the suppressed oxygen vacancies. With the illuminating wavelength red-shifting up to 532 nm, the 45 nm-thick AYZO film slightly enhances its transmittance to 90% with different annealing durations. The resistivity of AYZO films reaches a minimum of 3.2 10 cm at 450 C-annealing for 15 min because the annealing process enhances the activation of ionized Yb and Al donor states in AYZO films. With the residual oxygen vacancies rigorously controlled to minimize the transmittance variation during annealing, the Yb ions added into the AYZO films contribute to the conductivity after activation but help to stabilize. Nevertheless, the annealing process for 15 min or longer duration contributes to a decreased resistivity due to the reduction of oxygen vacancy by crystalline regrowth of the AYZO films. The resistivity of AYZO films is still dominated by the oxygen-vacancy instead of the ionized Al and Yb states even after activation. With the co-doping of Yb ions, the AYZO film effectively decreases its resistivity to be a competitive candidate to substitute the ITO for a highly transparent and conductive electrode.

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Tunable Amorphous Photonic Materials with Pigmentary Colloidal Nanostructures

Han

Lee

Dudoff

et al. 2017

Advanced Optical Materials

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Amorphous photonic structures exhibit interesting optical properties such as non-iridescent angle-independent structural colors and isotropic photonic band gaps. Here, we demonstrate colloidal assemblies of engineered amorphous photonic materials, using pigmentary α-Fe 2 O 3 /SiO 2 core/shell nanoparticles, exhibiting non-iridescent and tunable colors. The observed colors result from combination of colloidal particle arrangements, giving arises to the structural colors, along with the inherent pigmentary color of the α-Fe 2 O 3 /SiO 2 nanoparticles. Colloidal particle assemblies of α-Fe 2 O 3 /SiO 2 core/shell nanoparticles, and therefore the resulting colors, can be manipulated by shell thickness, particle concentration and external electrical stimuli. α-Fe 2 O 3 /SiO 2 nanoparticles based amorphous photonic structures exhibit short-range order on a length scale comparable to optical wavelengths and are weakly correlated to each other, as confirmed by ultra-small-angle X-ray scattering measurements. Dynamic tunability of α-Fe 2 O 3 /SiO 2 nanomaterials in the visible wavelengths is demonstrated using electrophoretic deposition process with a noticeable difference between transmitted and reflected colors. Amorphous structures have been investigated both theoretically and experimentally due to their unique properties as compared with perfectly ordered crystalline structures [1] . Prototypical A novel amorphous photonic structures using pigmentary α-Fe 2 O 3 /SiO 2 core/shell nanoparticles are succesfully fabricated. The resulting non-iridicent brilliant colors are in combination of pigmenary and structural colororation and manipulated by shell thickness, particle concentration and external electrical stimuli using electrophoretic deposition process. In the process, fully reversible and instantaneous color change as well as noticeable difference between transmitted and reflected colors is observed.

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Nanograin crystalline transformation enhanced UV transparency of annealing refined indium tin oxide film

Abstract: Articles you may be interested in UV irradiation effect on sol-gel indium tin oxide nanopatterns replicated by room-temperature nanoimprint

Cited by 16 publications

References 19 publications

Improvement of optical and electrical properties of ITO thin films by electro-annealing

Improvement of optical and electrical properties of ITO thin films by electro-annealing

Performance of Highly Transparent and Stable Zinc Oxide Co-Doped Thin-Film by Aluminum and Ytterbium

Tunable Amorphous Photonic Materials with Pigmentary Colloidal Nanostructures

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