Nanogranular structures formed by combinatorial control processing of size-selected metal nanoparticles

Abstract

Nanogranular films and lines, which are composed of size-selected Au, Ni, and Pt nanoparticles (NPs) and which exhibit an intermediate structure between that of the individual NPs and that of polycrystalline ones, were produced by a fully physical process. By using a combination of techniques such as lithography, lift-off, size selection, and aerosol deposition, well-designed Au lines (linewidth W=80 nm) and thickness-controlled rectangular patterns could be produced, while Ni and Pt NPs did not form continuous lines if the linewidth was less than W=150 nm. This difference might be explained by the extent of collision-induced surface melting during NP deposition onto the substrate.

Polarization Properties of Bismuth Strontium Tantalate Ceramic Films Deposited by Aerosol Deposition Method

“…[15][16][17] Aerosol deposition (AD) method, which is based on room temperature impact consolidation (RTIC) phenomena, is attracting attention because it can form thick ceramic layers of simple or complex compositions at a room temperature. [18][19][20][21][22][23][24][25][26][27][28][29][30][31][32][33][34][35][36] The use of the AD method has already been reported for the fabrication of the piezoelectric Pb(Zr,Ti)O 3 (PZT), [20][21][22] and its application as a component in a piezoelectric actuator. 23) Also, the AD method was successfully used to enhance the dielectric properties in the THz range for PbTiO 3 and (Pb 0:91 ,La 0:09 )(Zr 0:65 ,Ti 0:35 )O 3 (PLZT), 24) and the electro-optical properties of PLZT films.…”

Temperature Dependence of Dielectric Properties of Barium Titanate Ceramic Films Prepared by Aerosol Deposition Method

“…The aerosol deposition (AD) method, which is based on the room temperature impact consolidation (RTIC) phenomenon, is attracting attention because it can form thick ceramic layers of simple or complex compositions at room temperature. 5,[14][15][16][17][18][19][20][21][22][23][24][25][26][27] The use of the AD method has already been reported for the fabrication of the piezoelectric Pb(Zr,Ti)O 3 (PZT), [15][16][17] and its application as a component in a piezoelectric actuator. 18) Furthermore the AD was successfully used to enhance the dielectric properties in the THz range for PbTiO 3 and (Pb 0:91 ,La 0:09 )(Zr 0:65 ,Ti 0:35 )O 3 (PLZT), 19) and the electro-optical properties of PLZT films.…”