Polarization Properties of Bismuth Strontium Tantalate Ceramic Films Deposited by Aerosol Deposition Method

Suzuki, Muneyasu; Nishihara, Yoshiya; Uesu, Yoshiaki; Akedo, Jun

doi:10.1143/jjap.51.09la17

Cited by 3 publications

(1 citation statement)

References 53 publications

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“…This result clearly demonstrates that the heat treatment at around 800°C or above induces to drastically promote grain growth, and the relationship between grain growth and heat treatment is distinctly-different from that of annealed SrBi 2 Ta 2 O 9 (SBTa) films deposited by the AD method. 33) For the SBTa thick films annealed at less than or equal to 1000°C, abnormal grain growth was not confirmed, and the D and grain size continuously increased with increasing annealing temperature. It is well-known that abnormal grain growth is induced by (I) liquid phase in the grain boundary, (II) interposition of second phase fine particles, (III) promoting activation of atomic element in grain boundary and (or) (IV) appropriate thermal gradient.…”

Section: Resultsmentioning

confidence: 87%

Polarization and leakage current properties of self-supported bismuth sodium titanate ceramic films deposited by aerosol deposition method

Suzuki

Akedo

2013

J. Ceram. Soc. Japan

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Self-supported (Bi 0.5 Na 0.5 )TiO 3 (BNT) dense ceramic films with a thickness of approximately 20¯m have been fabricated by use of an aerosol deposition method with heat treatment and sapphire single crystal substrates. Investigations of their constitution phase and crystal structure, observation of their microstructure, and measurement of polarization properties and leakage current density (J ) were performed. Wlile the films heat-treated at 800 and 900°C in air indicated the low J µ 10 ¹7 A/cm 2 at 150 kV/cm, the sintered bulks and the films annealed at 900°C in the BNT starting raw powder showed the relatively high J of approximately 10 ¹6 A/cm 2 at 150 kV/cm. These films heat-treated at 800 and 1000°C in air and sintered bulks showed the almost the same coercive field (E c ) of approximately 57 kV/cm (in the 56 to 58 kV/cm range), and the films heat-treated at 1000°C in air exhibited good polarization properties and remanent polarization (P r ) of 25¯C/cm 2 . The AD method is proposed to be effective for obtaining self-supported BNT thick films with good saturated hysteresis loops and low J.

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Section: Resultsmentioning

confidence: 87%

Polarization and leakage current properties of self-supported bismuth sodium titanate ceramic films deposited by aerosol deposition method

Suzuki

Akedo

2013

J. Ceram. Soc. Japan

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Effect of process for producing Al<sub>2</sub>O<sub>3</sub> particles on deposition efficiency in aerosol deposition method

Naoe

Sato

Nishiki

2014

J. Ceram. Soc. Japan

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The aerosol deposition method (ADM) is a technique to form dense films by impacting solid particles on a substrate. Dense ceramic films with thicknesses of over several¯m can be formed directly on substrates even at room temperature by the ADM. In this study, to improve the deposition efficiency of the ADM, the effect of the process for producing Al 2 O 3 particles on the deposition efficiency was investigated. Two types of commercially available ¡-Al 2 O 3 particles produced by sintering Al(OH) 3 (sintered particle) and chemical vapor deposition (CVD particle) were used. The average deposition efficiency of the sintered particles ranged from 0.067 to 0.088% and was much higher than that of the CVD particles, which ranged from 0.005 to 0.012%. When the sintered particles were used, the AD films grew about 30¯m. In contrast, when the CVD particles were used, the AD films didn't grow over several¯m. The morphologies of the AD films suggested that the deformed volume of the sintered particles was larger than that of the CVD particles. The specific fracture energy of each particle was estimated from a compression test. The average specific fracture energy of the sintered particles was 7.3 © 10 7 J/m 3 , which was about 32% of that of the CVD particles (2.3 © 10 8 J/m 3 ). Comparing this specific fracture energy with the specific kinetic energy, which was estimated to range from 4.4 © 10 7 to 1.8 © 10 8 J/m 3 , there is a possibility that the sintered particles showed higher deposition efficiency because they could deform by their kinetic energy and easily form activated surface promoting the bonding between the ceramic particles. We conclude that the specific fracture energy of the particle depends on the process for producing it and could be the crucial property to focus on to improve the deposition efficiency.

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Piezoelectric Thick Film Deposition via Powder/Granule Spray in Vacuum: A Review

et al. 2020

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Conventional thin-film processing techniques remain inadequate for obtaining superior dense ceramic thick films. The incompatibility of ceramic films prepared via other methods, such as screen printing, spin coating, and sputtering, is a major obstacle in the fabrication of thick film-based ceramic electronic components. The granule spray in vacuum (GSV) processes and aerosol deposition (AD) are important coating approaches for forming dense ceramic thick films featuring nanoscale crystallite structures at room temperature, which offer excellent material properties and facilitate cost-effective production. AD ceramic coatings require the acceleration of solid-state submicron ceramic particles via gas streams with a velocity of a few hundred meters per second, which are then wedged onto a substrate. This process is economical and particularly useful for the fabrication of piezoelectric thick film-based microactuators, energy harvesters, sensors, and optoelectronic devices. More recently, the GSV technique was improved to achieve more uniform and homogeneous film deposition after AD. This review article presents a detailed overview of the AD and GSV processes for piezoelectric thick films in terms of recent scientific and technological applications.

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Polarization Properties of Bismuth Strontium Tantalate Ceramic Films Deposited by Aerosol Deposition Method

Cited by 3 publications

References 53 publications

Polarization and leakage current properties of self-supported bismuth sodium titanate ceramic films deposited by aerosol deposition method

Polarization and leakage current properties of self-supported bismuth sodium titanate ceramic films deposited by aerosol deposition method

Effect of process for producing Al<sub>2</sub>O<sub>3</sub> particles on deposition efficiency in aerosol deposition method

Piezoelectric Thick Film Deposition via Powder/Granule Spray in Vacuum: A Review

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