Nanoimprint lithography from CHARPAN Tool exposed master stamps with 12.5 nm hp

Mühlberger, M.; Boehm, Michael W.; Bergmair, Iris; Chouiki, M.; Schoeftner, Rainer; Kreindl, Gerald; Kast, M.; Treiblmayr, D.; Glinsner, T.; Miller, R. A.; Platzgummer, Elmar; Loeschner, Hans; Joechl, Peter; Eder-Kapl, Stefan; Narzt, T.; Lausecker, E.; Fromherz, T.

doi:10.1016/j.mee.2010.12.110

Cited by 13 publications

(9 citation statements)

References 11 publications

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“…Our prototype BPM here provides an areal density of 2.58 Gb in −2 . Solid-mold nanoimprinting with a pitch of 25 nm and sub-15 nm feature sizes has been previously demonstrated [24,25] which could provide an areal density of 1 Tb in −2 . Such an areal density is already in par with the latest harddisk drives reported in 2011 whose areal densities are around 0.5 to 1 Tb in −2 .…”

Section: Doi: 101002/adma201104171mentioning

confidence: 99%

A Polyferroplatinyne Precursor for the Rapid Fabrication of L1₀‐FePt‐type Bit Patterned Media by Nanoimprint Lithography

Dong

et al. 2012

Advanced Materials

139

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A polyferroplatinyne polymer can be patterned on the surface of Si wafer in ordered nanoline or nanodot shapes with PDMS molds through nanoimprint lithography (NIL), and subsequent thermal treatment gives rise to the nanopatterned arrays of L1(0) -FePt nanoparticles with the same periodicities. The method offers excellent potential to be utilized in the simple and rapid fabrication of bit patterned media for magnetic data recording.

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Section: Doi: 101002/adma201104171mentioning

confidence: 99%

A Polyferroplatinyne Precursor for the Rapid Fabrication of L1₀‐FePt‐type Bit Patterned Media by Nanoimprint Lithography

Dong

et al. 2012

Advanced Materials

139

View full text Add to dashboard Cite

show abstract

“…Our prototype BPM here provides an areal density of 2.58 Gb in −2 . Solid‐mold nanoimprinting with a pitch of 25 nm and sub‐15 nm feature sizes has been previously demonstrated24, 25 which could provide an areal density of 1 Tb in −2 . Such an areal density is already in par with the latest hard‐disk drives reported in 2011 whose areal densities are around 0.5 to 1 Tb in −2 26.…”

mentioning

confidence: 99%

New Iron Pyridylamino‐Bis(Phenolate) Catalyst for Converting CO₂ into Cyclic Carbonates and Cross‐Linked Polycarbonates

et al. 2015

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The atom-efficient reaction of CO2 with a variety of epoxides has been efficiently achieved employing iron pyridylamino-bis(phenolate) complexes as bifunctional catalysts. The addition of a Lewis base co-catalyst allowed significant reduction in the amount of iron complex needed to achieve high epoxide conversions. The possibility of controlling the selectivity of the reaction towards either cyclic carbonate or polycarbonate was evaluated. An efficient switch in selectivity could be achieved when cyclic epoxides such as cyclohexene oxide and the seldom explored 1,2-epoxy-4-vinylcyclohexane were used as substrates. The obtained poly(vinylcyclohexene carbonate) presents pending vinyl groups, which allowed post-synthetic cross-linking by reaction with 1,3-propanedithiol. The cross-linked polycarbonate displayed a substantial increase in the glass transition temperature and chemical resistance, thus opening new opportunities for the application of these green polymers.

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“…Revolutionary design focusing on improving the performance of the ion column needs to be carried out. One solution of this contradiction is to introduce parallel ion beam machining to the ion beam system, which is the Charged Particle Nanotech (CHARPAN) project [28,34,47,49]. It can generate hundred thousands of ion beams working in parallel structured by a programmable aperture plate system.…”

Section: Beam Diametermentioning

confidence: 99%

Deterministic Fabrication of Micro- and Nanostructures by Focused Ion Beam

Sun

Luo

2013

Lecture Notes in Nanoscale Science and Technology

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Focused ion beam (FIB) machining is an ideal technique for both micro-and nanofabrication. This chapter describes a deterministic fabrication approach to accurately obtain micro-and nanostructures. It starts with a detailed introduction of FIB machining mechanism, followed by a surface topography simulation method and a divergence compensation method. The effectiveness of this fabrication approach has been fully demonstrated through a number of experiments which show that the surface topography of the machined material can be precisely predicted; the divergence compensation method can reduce the machining error, and the machined surface form accuracy can be dramatically improved. Combining with other techniques, some hybrid manufacturing techniques based on FIB machining are also introduced.

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Nanoimprint lithography from CHARPAN Tool exposed master stamps with 12.5 nm hp

Cited by 13 publications

References 11 publications

A Polyferroplatinyne Precursor for the Rapid Fabrication of L1₀‐FePt‐type Bit Patterned Media by Nanoimprint Lithography

A Polyferroplatinyne Precursor for the Rapid Fabrication of L1₀‐FePt‐type Bit Patterned Media by Nanoimprint Lithography

New Iron Pyridylamino‐Bis(Phenolate) Catalyst for Converting CO₂ into Cyclic Carbonates and Cross‐Linked Polycarbonates

Deterministic Fabrication of Micro- and Nanostructures by Focused Ion Beam

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Nanoimprint lithography from CHARPAN Tool exposed master stamps with 12.5 nm hp

Cited by 13 publications

References 11 publications

A Polyferroplatinyne Precursor for the Rapid Fabrication of L10‐FePt‐type Bit Patterned Media by Nanoimprint Lithography

A Polyferroplatinyne Precursor for the Rapid Fabrication of L10‐FePt‐type Bit Patterned Media by Nanoimprint Lithography

New Iron Pyridylamino‐Bis(Phenolate) Catalyst for Converting CO2 into Cyclic Carbonates and Cross‐Linked Polycarbonates

Deterministic Fabrication of Micro- and Nanostructures by Focused Ion Beam

Contact Info

Product

Resources

About

A Polyferroplatinyne Precursor for the Rapid Fabrication of L1₀‐FePt‐type Bit Patterned Media by Nanoimprint Lithography

A Polyferroplatinyne Precursor for the Rapid Fabrication of L1₀‐FePt‐type Bit Patterned Media by Nanoimprint Lithography

New Iron Pyridylamino‐Bis(Phenolate) Catalyst for Converting CO₂ into Cyclic Carbonates and Cross‐Linked Polycarbonates