Nanoimprint lithography of topology optimized photonic crystal devices

Bilenberg, Brian; Frandsen, Lars Hagedorn; Nielsen, Theodor; Vogler, Marko; Borel, Peter Ingo

doi:10.1109/cleo.2006.4628228

Cited by 2 publications

(2 citation statements)

References 3 publications

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“…The main low-cost production and fast prototyping techniques to manufacture COC are hot embossing, injection molding and nanoimprint lithography (NIL) [ [96] , [97] , [98] ].…”

Section: Resultsmentioning

confidence: 99%

Potential of CO2-laser processing of quartz for fast prototyping of microfluidic reactors and templates for 3D cell assembly over large scale

Perrone

Cesaria

Zizzari

et al. 2021

Materials Today Bio

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Carbon dioxide (CO 2 )-laser processing of glasses is a versatile maskless writing technique to engrave micro-structures with flexible control on shape and size. In this study, we present the fabrication of hundreds of microns quartz micro-channels and micro-holes by pulsed CO 2 -laser ablation with a focus on the great potential of the technique in microfluidics and biomedical applications. After discussing the impact of the laser processing parameters on the design process, we illustrate specific applications. First, we demonstrate the use of a serpentine microfluidic reactor prepared by combining CO 2 -laser ablation and post-ablation wet etching to remove surface features stemming from laser-texturing that are undesirable for channel sealing. Then, cyclic olefin copolymer micro-pillars are fabricated using laser-processed micro-holes as molds with high detail replication. The hundreds of microns conical and square pyramidal shaped pillars are used as templates to drive 3D cell assembly. Human Umbilical Vein Endothelial Cells are found to assemble in a compact and wrapping way around the micro-pillars forming a tight junction network. These applications are interesting for both Lab-on-a-Chip and Organ-on-a-Chip devices.

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“…The main low-cost production and fast prototyping techniques to manufacture COC are hot embossing, injection molding and nanoimprint lithography (NIL) [ [96] , [97] , [98] ].…”

Section: Resultsmentioning

confidence: 99%

Potential of CO2-laser processing of quartz for fast prototyping of microfluidic reactors and templates for 3D cell assembly over large scale

Perrone

Cesaria

Zizzari

et al. 2021

Materials Today Bio

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“…Microlenses (Appasamy et al 2005) and photonic crystals (Bilenberg et al 2006) have for instance been fabricated. Still there are surprisingly few examples of microfluidics with integrated optics in COP.…”

Section: Integrated Opticsmentioning

confidence: 99%

Cyclic olefin polymers: emerging materials for lab-on-a-chip applications

Nunes

Ohlsson

Ordeig

et al. 2010

Microfluid Nanofluid

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258

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Cyclic olefin polymers (COPs) are increasingly popular as substrate material for microfluidics. This is due to their promising properties, such as high chemical resistance, low water absorption, good optical transparency in the near UV range and ease of fabrication. COPs are commercially available from a range of manufacturers under various brand names (Apel, Arton, Topas, Zeonex and Zeonor). Some of these (Apel and Topas) are made from more than one kind of monomer and therefore also known as cyclic olefin copolymers (COCs). In order to structure these materials, a wide array of fabrication methods is available. Laser ablation and micromilling are direct structuring methods suitable for fast prototyping, whilst injection moulding, hot embossing and nanoimprint lithography are replication methods more appropriate for low-cost production. Using these fabrication methods, a multitude of chemical analysis techniques have already been implemented. These include microchip electrophoresis (MCE), chromatography, solid phase extraction (SPE), isoelectric focusing (IEF) and mass spectrometry (MS). Still much additional work is needed to characterise and utilise the full potential of COP materials. This is especially true within optofluidics, where COPs are still rarely used, despite their excellent optical properties. This review presents a detailed description of the properties of COPs, the available fabrication methods and several selected applications described in the literature.

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Nanoimprint lithography of topology optimized photonic crystal devices

Cited by 2 publications

References 3 publications

Potential of CO2-laser processing of quartz for fast prototyping of microfluidic reactors and templates for 3D cell assembly over large scale

Potential of CO2-laser processing of quartz for fast prototyping of microfluidic reactors and templates for 3D cell assembly over large scale

Cyclic olefin polymers: emerging materials for lab-on-a-chip applications

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