Nanoindentation and nanowear of extremely thin protective layers of C–N and B–C–N

Wang, M.; Miyake, Shojiro; Saito, Tadashi

doi:10.1016/j.triboint.2005.03.001

Cited by 10 publications

(3 citation statements)

References 14 publications

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“…If a magnetic layer with a graded composition can be deposited as a protective layer, then the above problem can be solved and the mechanical properties of the magnetic layer can be effectively improved because of the formation of a discontinuous protective film. As a result, it was clarified that the mechanical properties of magnetic medium layers can be improved by the deposition of nitrogen-containing carbon (C -N) sputtered films with a thickness of 30 nm or less by employing the complex treatment used in our previous study [9][10][11][12].…”

Section: Introductionmentioning

confidence: 99%

Tribological properties of extremely thin protective carbon nitride films deposited on magnetic discs by complex treatment

Miyake

Saito

Wang

et al. 2006

Proceedings of the Institution of Mechanical Engineers, Part J:

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Extremely thin nitrogen-containing carbon (C-N) films with thicknesses of 3, 6, and 9 nm were prepared as a protective overcoat on CoCrTa magnetic discs by complex treatment, including plasma irradiation and C-N reactive sputtering in an atmosphere of nitrogen (N2) and nitrogen and helium (N2 + He) gaseous mixture. Films of various thicknesses were obtained by controlling deposition time. The bonding structure and composition of the film were studied by X-ray photoelectron spectroscopy. A radio frequency power of 25 W was experimentally confirmed to be the optimum plasma irradiation power at which a ratio of magnetic loss is <5 per cent. Nanohardness and elastic modulus of the films were measured by nanoindentation. Wear and oscillation scratch tests were carried out to investigate the wear-resistance property of the films. The improved performance of C-N films is attributed to the high indentation hardness, good wear-resistant property, and corrosion resistance of the coatings due to complex treatment and He addition.

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Section: Introductionmentioning

confidence: 99%

Tribological properties of extremely thin protective carbon nitride films deposited on magnetic discs by complex treatment

Miyake

Saito

Wang

et al. 2006

Proceedings of the Institution of Mechanical Engineers, Part J:

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“…CNx thin films are currently being extensively studied for their potential tribological applications owing to their favorable mechanical and tribological properties [10]. These materials have already found applications as protective overcoatings for hard discs and read/write heads [11,12]; furthermore, such materials are of interest in the field of nanotechnology owing to their high wear resistance and low friction properties [11,12]. It has been found that amorphous CNx films exhibit good wear resistance with a low coefficient of friction (COF) in the range of 0.07-0.3, which is dependent on the N/C ratio and the fraction of the sp3-bonded carbon in the film [8,9].…”

Section: Introductionmentioning

confidence: 99%

Surface Morphology and Tribological Properties of Nanoscale (Ti, Al, Si, C)N Multilayer Coatings Deposited by Reactive Magnetron Sputtering

Wang¹,

Miyake²

2018

Lubrication - Tribology, Lubricants and Additives

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The current topics related to the morphology and tribology of TiAlN monolayer, TiAlN/ SiNx, TiAlN/CNx and TiAlN/CNxAECNx nanoscale multilayer coatings and refer to our recent results on the evaluation of surface morphology, and nanoscale mechanical and tribological properties of coatings deposited on cemented carbide cutting tools and silicon wafer substrates by reactive magnetron sputtering deposition. The surface morphology and microstructure of the coatings were evaluated with an atomic force microscope in dynamic friction mode together with transmission electron microscope imaging. The tribological properties of the coatings were evaluated by pin-on-disc friction testing in dry air, and high-frequency linear-oscillation friction testing under various lubrication conditions. The tribological properties of the multilayer TiAlCrSiN and TiAlSiN coatings were compared with those of a single layer TiAlN coating to evaluate their possible applications to the surfaces of cutting tools. The machining performances of single layer TiAlN, multilayer TiAlSiN, and TiAlCrSiN coated drills were investigated in drilling of carbon steel.

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“…Thus, these materials have attracted considerable interest as novel materials for hard coating applications. CN x , CN/BN and (C/BN) n films have been widely applied [6][7][8][9][10]. Nevertheless, a high resistivity to plastic deformation during 1 Author to whom any correspondence should be addressed.…”

Section: Introductionmentioning

confidence: 99%

Investigation of micro-electro-mechanical processing characteristics of layered boron nitride and carbon films

Miyake¹,

Wang²,

Kim³

2006

Nanotechnology

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A microsquare fabrication process is developed for the investigation of the processing characteristics of boron nitride and carbon (C/BN)n and (BN/C)n films with a 4 nm nanoperiod multilayer structure. Simultaneous surface topography, friction and current measurements were performed on the multilayer films by conductive atomic force microscopy (AFM) with force modulation, which permits the quantitative recording of current and frictional force as functions of the applied force. The current image showed that highly conducting sites formed on carbon (C) layers and that nonconducting sites existed on boron nitride (BN) layers and/or mixed layers. Furthermore, amplitude response (friction force) images show that the conducting sites have a low frictional force, whereas the nonconducting sites have a high frictional force. This is thought to be due to the structure phase of the nanostructure of the films. Further, the result that the nonconducting sites have a high amplitude response (friction) implies the existence of a mixed layer (interface) between the C and BN layers. It is suggested that friction and surface-current measurements are effective methods of investigating multilayer nanostructural surfaces and fabricating micro-electro-mechanical processing systems of a high precision.

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Nanoindentation and nanowear of extremely thin protective layers of C–N and B–C–N

Cited by 10 publications

References 14 publications

Tribological properties of extremely thin protective carbon nitride films deposited on magnetic discs by complex treatment

Tribological properties of extremely thin protective carbon nitride films deposited on magnetic discs by complex treatment

Surface Morphology and Tribological Properties of Nanoscale (Ti, Al, Si, C)N Multilayer Coatings Deposited by Reactive Magnetron Sputtering

Investigation of micro-electro-mechanical processing characteristics of layered boron nitride and carbon films

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