2013
DOI: 10.1557/jmr.2013.252
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Nanoindentation cracking in gallium arsenide: Part I. In situ SEM nanoindentation

Abstract: International audienc

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Cited by 14 publications
(4 citation statements)
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“…Cracks nucleate and propagate to relieve the high local stresses generated during the indentation process. This agrees with previous works in semiconductors [26,27]. For the indentation experiments of sapphire at room-temperature, it is also confirmed that twinning and fracture are the main mechanisms responsible for the deformation of sapphire [28,29].…”
Section: A C C E P T E D Accepted Manuscriptsupporting
confidence: 91%
“…Cracks nucleate and propagate to relieve the high local stresses generated during the indentation process. This agrees with previous works in semiconductors [26,27]. For the indentation experiments of sapphire at room-temperature, it is also confirmed that twinning and fracture are the main mechanisms responsible for the deformation of sapphire [28,29].…”
Section: A C C E P T E D Accepted Manuscriptsupporting
confidence: 91%
“…GaAs {110} steps occur when the principal stress was not perfectly aligned with the cleavage plane or when there were any other misalignments with the initial flaw. In this study, the GaAs steps occurred along the (110) planes, consistent with it being the weakest plane as reported in the literature 12,[34][35][36][37][38][39] . Figure 2-3 showed that the GaAs (110) steps fan out from the origin where the crack velocity is nearly zero, which indicates that their formation is not related to dynamic effects.…”
Section: A Gaas Step-like Terracessupporting
confidence: 91%
“…The indentation instrument used in this paper was developed by our group but the phenomenon shown in figure 1(a) generally exists in load-displacement curves obtained by some other indentation instruments [14][15][16][17][18][19][20]. In this section, a simple description of our indentation instrument will be given first and then emphasis will be focused on analysis of the possible reasons leading to the shape of the load-displacement curve as shown in figure 1(a).…”
Section: The Custom-made Indentation Instrument and Analysismentioning
confidence: 99%
“…The inflection affected determination of the residual indentation depth [13] and further affected the calculation result. In order to obtain the reason, we checked the literature and found that it was a typical type of load-displacement curve that was discussed in some published papers [14][15][16][17][18][19][20]. However, the reason is not very clear.…”
Section: Introductionmentioning
confidence: 99%