2010
DOI: 10.1016/j.cossms.2009.11.002
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Nanoindentation-induced phase transformation in (110)-oriented Si single-crystals

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Cited by 67 publications
(45 citation statements)
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“…The detailed experimental procedures can be found elsewhere [6][7][8][9]. Before applying the loading onto the HMO specimen, nanoindentation must be conducted on the standard sample (here fused silica with Young's modulus of 68-72 GPa was used) to obtain the reasonable loading range.…”
Section: Methodsmentioning
confidence: 99%
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“…The detailed experimental procedures can be found elsewhere [6][7][8][9]. Before applying the loading onto the HMO specimen, nanoindentation must be conducted on the standard sample (here fused silica with Young's modulus of 68-72 GPa was used) to obtain the reasonable loading range.…”
Section: Methodsmentioning
confidence: 99%
“…Nanoindentation technique is especially well suited for characterizing the mechanical characteristics of small structures [4,5] as well as thin films and coatings [6][7][8][9]. Analysis of the load-displacement curve obtained by nanoindentation allows the primary parameters such as the hardness and Young's modulus to be obtained without visualizing the indentation.…”
Section: Introductionmentioning
confidence: 99%
“…In addition, faster loading/unloading rates promoted occurrence of pop-out events (13/20 for 50 mN/s; 11/20 for 25 mN/s; 4/20 for 10 mN/s) as well as phase transformation to r8-Ge as shown in Figure 5. These facts imply that the correlation between r8 phase formation and pop-out events exist as mentioned in studies of indentation of Si [23][24][25][26][27][28] and cold indentation on dc-Ge [10]. The appearance of pop-out events alone without phase transformation in some indents might result from insufficient resolution of the Raman spectrometer.…”
Section: Effects Of Indentation Modes On Phase Transformation Behaviorsmentioning
confidence: 88%
“…To ensure that the residual phases were minimally affected by further phase transformation at room temperature [5,11,13], the measurement of residual phases in indents was performed within three hours after indentation. In previous studies, some specific deformation responses, for example pop-in, pop-out, and elbow have been reported in indentation studies of Si [20][21][22][23][24][25][26][27][28] and Ge [8,10,11,[14][15][16]23]. In this study, the effects of experimental parameters on these deformation responses were statistically analyzed as well as phase transformation process during both single and cyclic indentation.…”
Section: Methodsmentioning
confidence: 99%
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