Nanoindentation of amorphous aluminum oxide films III. The influence of the substrate on the elastic properties

Чеченин, Н.Г.; Bøttiger, J.; Krog, J.P.

doi:10.1016/s0040-6090(96)09600-9

Cited by 42 publications

(18 citation statements)

References 17 publications

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“…6b). Now and knowing the elastic modulus of the film, it is possible to test the robustness of the different models [3,[14][15][16][17][18][19]. All the elastic modulus values obtained in nanoindentation (Fig.…”

Section: Resultsmentioning

confidence: 99%

“…The porous layer is composed of hexagonal columnar cells [1] and, consequently, the coordinate number can be associated to the number of neighbours for these columns (6 in this study). On the other hand, Chechenin et al [3] have determined by nanoindentation the elastic modulus of an aluminium oxide film obtained by anodizing oxidation.…”

Section: Resultsmentioning

confidence: 99%

“…That is probably why Korsunsky and Constantinescu [54] kept the free-dependence these two fitting parameters in WF 3 . Note that these authors have based their model on their own model developed for the hardness determination of thin film which leads to the same expression given by Perriot and Barthel [16].…”

Section: Indentation On Thin Filmsmentioning

confidence: 99%

“…The cells grow normally to the surface of the aluminium substrate, which is separated from the cells by a thin barrier layer of 15 nm of thickness [1]. The structure of such an anodized material has been largely studied [1,2], but only few investigations on the mechanical properties of the porous oxide film have been reported in the past [3,4].…”

Section: Introductionmentioning

confidence: 99%

“…For the tested material, the porosity of the film is associated to the presence of the pores inside the cells. Since the pores have a regular shape, the model of Jernot et al [23] can be validly applied to compare the elastic modulus of the porous film to that of the massive aluminium oxide [3,4,29].…”

Section: Introductionmentioning

confidence: 99%

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An analysis of the elastic properties of a porous aluminium oxide film by means of indentation techniques

Hemmouche¹,

Chicot²,

Amrouche³

et al. 2013

Materials Science and Engineering: A

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is an open access repository that collects the work of Arts et Métiers ParisTech researchers and makes it freely available over the web where possible. a b s t r a c tThe elastic modulus of thin films can be directly determined by instrumented indentation when the indenter penetration does not exceed a fraction of the film thickness, depending on the mechanical properties of both film and substrate. When it is not possible, application of models for separating the contribution of the substrate is necessary. In this work, the robustness of several models is analyzed in the case of the elastic modulus determination of a porous aluminium oxide film produced by anodization of an aluminium alloy. Instrumented indentation tests employing a Berkovich indenter were performed at a nanometric scale, which allowed a direct determination of the film elastic modulus, whose value was found to be approximately 11 GPa. However, at a micrometric scale the elastic modulus tends toward the value corresponding to the substrate, of approximately 73 GPa. The objective of the present work is to apply different models for testing their consistency over the complete set of indentation data obtained from both classical tests in microindentation and the continuous stiffness measurement mode in nanoindentation. This approach shows the continuity between the two scales of measurement thus allowing a better representation of the elastic modulus variation between two limits corresponding to the substrate and film elastic moduli. Gao's function proved to be the best to represent the elastic modulus variation.

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