2015
DOI: 10.1063/1.4937549
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Nanomanufacturing of titania interfaces with controlled structural and functional properties by supersonic cluster beam deposition

Abstract: Great emphasis is placed on the development of integrated approaches for the synthesis and the characterization of ad hoc nanostructured platforms, to be used as templates with controlled morphology and chemical properties for the investigation of specific phenomena of great relevance for technological applications in interdisciplinary fields such as biotechnology, medicine and advanced materials. Here we discuss the crucial role and the advantages of thin film deposition strategies based on cluster-assembling… Show more

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Cited by 44 publications
(89 citation statements)
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References 64 publications
(65 reference statements)
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“…With the help of this technique it is possible to create reproducible nanostructured films with controllable nanotopographical features (representative examples in Figure 1A) (Wegner et al, 2006; Podestà et al, 2015). Compared to other nanofabrication techniques (especially top-down lithographic approaches) (Mendes, 2013; Chen et al, 2015), SCBD provides the additional advantage to enable the coverage of large macroscopic areas with a defined surface nanotopography.…”
Section: Resultsmentioning
confidence: 99%
“…With the help of this technique it is possible to create reproducible nanostructured films with controllable nanotopographical features (representative examples in Figure 1A) (Wegner et al, 2006; Podestà et al, 2015). Compared to other nanofabrication techniques (especially top-down lithographic approaches) (Mendes, 2013; Chen et al, 2015), SCBD provides the additional advantage to enable the coverage of large macroscopic areas with a defined surface nanotopography.…”
Section: Resultsmentioning
confidence: 99%
“…1(a) and 1(b) highlight the typical morphology of ns-ZrO x films produced by SCBD, characterized by high specific area, roughness, and porosity at the nano scale. 48 As it is well known for evolving growing interfaces, surface roughness, specific area, as well as the lateral dimension of the largest morphological features (the correlation length) increase as time and thickness increase, according to simple scaling laws. 49,50 The characterization of the scaling exponents allows therefore predicting and controlling the evolution of the surface morphology of nanostructured materials.…”
Section: As-deposited Film Structure and Nanoscale Morphologymentioning
confidence: 99%
“…49 The value of b is obtained by a linear regression of the experimental Rq vs h curve in a log -log plot. According to our data, b ¼ 0.368 6 0.001 for ns-ZrO x films, a value typical of evolving interfaces in the ballistic deposition regime, [48][49][50] where incoming particles stick on the substrate upon landing without significant mobility. A similar value of the growth exponent b was obtained for cluster-assembled nanostructured titania films (ns-TiO 2 ) produced by SCBD (b ns-TiO2 ¼ 0.380 6 0.040).…”
Section: As-deposited Film Structure and Nanoscale Morphologymentioning
confidence: 99%
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