2010
DOI: 10.1038/nmat2611
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Nanopatterning Si(111) surfaces as a selective surface-chemistry route

Abstract: Using wet-chemical self-assembly, we demonstrate that standard surface reactions can be markedly altered. Although HF etching of Si surfaces is known to produce H-terminated surfaces, we show that up to approximately 30% of a monolayer of stable Si-F bonds can be formed on atomically smooth Si(111) surfaces on HF reaction, when chemically isolated Si atoms are the target of the reaction. Similarly, approximately 30% Si-OH termination can be achieved by immersion of the partially covered F-Si(111) surface in wa… Show more

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Cited by 133 publications
(191 citation statements)
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“…This is logical as step edge dangling bonds are the only ones that may be susceptible to Si-Si backbond weakening. Furthermore, the atomic flatness of the surface lattice does not permit any further attacks of Si-Si bonding [28], in good agreement with our observations. For p-type silicon (111), the large density of holes helps weaken the Si-Si bond at the surface, and this allows for nucleophilic attack according to the Gerischer's mechanism [29,30].…”
Section: Resultssupporting
confidence: 91%
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“…This is logical as step edge dangling bonds are the only ones that may be susceptible to Si-Si backbond weakening. Furthermore, the atomic flatness of the surface lattice does not permit any further attacks of Si-Si bonding [28], in good agreement with our observations. For p-type silicon (111), the large density of holes helps weaken the Si-Si bond at the surface, and this allows for nucleophilic attack according to the Gerischer's mechanism [29,30].…”
Section: Resultssupporting
confidence: 91%
“…This is logical as step edge dangling bonds are the only ones that may be susceptible to Si-Si backbond weakening. Furthermore, the atomic flatness of the surface lattice does not permit any further attacks of Si-Si bonding [28], in good agreement with our observations. On the other hand, these physical rationales and processes were relatively similar for the p-type silicon (100) surfaces with some notable differences: a HF acid treated (100) surface would exhibit inherent roughening as well as a mixed population of silicon monohydride, bihydride and trihydrides [34].…”
Section: Resultssupporting
confidence: 91%
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“…Longo et al studied an alternative approach based on work involving the grafting of OH-containing compounds by Michalak. [24][25][26] The initial process was based on a methodology to covalently bond an alcohol to an Si-H surface and was extended to phosphonic acids. This study differed by attempting to reduce the amount of potentially deleterious carbon in the process which may be a problem with current carbon-based precursors.…”
mentioning
confidence: 99%
“…We also note that the peak at 790 cm -1 in the FT-IR spectrum after reaction is located in the region where various Si-OH vibrational modes have been noted in the past. 119 However, the lack of a hydroxyl feature at 3600 cm -1 is inconsistent with the assignment of the peak at 790 cm -1 as due to Si-OH.…”
Section: Ft-ir Characterization Of Si Nps Reacted With N-hexanementioning
confidence: 94%