Nanoporous Anodic Aluminum Oxide (AAO) Thin Film Fabrication with Low-Grade Aluminium

Abstract

Anodic aluminum oxide (AAO) is well known for its nanoscopic structures and its applications in microfluidics, sensors and nanoelectronics. The pore density, the pore diameter, and the interpore distance of an AAO substrate can be controlled by varying anodization process conditions. In this research, the self-organized two-step anodization is carried out with a low-grade (Al6061) aluminium substrate using a 40V voltage at the temperature of 2 to 5 °C. Three experiments are done with the anodization time of 24 hours, 48 hours and 72 hours. The structural features of AAO are characterized by a field emission electron microscope (FE-SEM). The data from FE-SEM show that the average pore diameter increases with the anodization time, and that the Al6061 aluminium substrate can be used to fabricate a nanoporous AAO film with an average pore diameter smaller than 17 nanometers.