A bottle-neck in the application of zeolite films as low-k dielectrics is the presence of 40-80 nm zeolite nanoparticles composing the film, causing both large mesopores and hampering the grooving of nanofeatures. Evaporation-assisted two-stage synthesis of MELtype zeolite nanosuspensions avoiding 40-80 nm zeolite nanoparticle formation in suspension was recently proposed in this journal for the preparation of zeolite films with improved properties and with possibility to groove nanofeatures at 65 nm. [1] We reproduced such zeolite films using that procedure involving well dispersed zeolite nanosuspension and characterized the porosity using ellipsometric porosimetry. We concluded that the approach of evaporation-assisted two-stage synthesis of MEL-type zeolite nanosuspensions does not lead to films with small and narrow pore size distribution where nanofeatures can be grooved. Pores of up to 50 nm width were observed in final spin-on MEL-zeolite films The preparation of films by spin coating of nanocrystal suspensions of Silicalite-1 and -2 type zeolites is being intensively investigated for their applicability as ultra-low-k materials in nanoelectronic devices. [1][2][3][4] Despite their low dielectric constant, they offer limitations related to the use of zeolite nanocrystal suspensions with particle sizes of 40-80 nm. [1,3e,3f ] The main drawbacks are the important surface roughness, the formation of large mesopores between individual nanocrystals, and the difficulty to groove nanofeatures. Although different zeolite syntheses involve the formation of primary zeolite particles smaller than 20 nm, these tend to agglomerate into larger ones at high concentrations or during the crystallization process. [5] In a recent publication in this journal Yan's group claimed to have overcome the agglomeration drawback by optimizing the synthesis conditions of MEL zeolite suspensions. [1] The authors reported that an evaporation-assisted two-stage synthesis of MELtype zeolite nanosuspensions significantly avoids the agglomeration in suspension of 14 nm MEL primary particles into larger 60-80 nm secondary particles. Briefly, the method consists of evaporating part of the solvent between two hydrothermal treatments of the synthesis mixture of the MEL-type zeolite. By evaporating 60 wt% of solvent, 98.4% of primary particles were reported to not agglomerate and be preserved in the final suspension (so called E-60). This was found in the dynamic light scattering analysis on this MEL suspension diluted with abundant water (0.05 mL E-60 in 4 mL water). The use of MEL suspensions with 98.4% of particles being only 14 nm (i.e., avoiding almost all the agglomeration) should minimize the formation of mesopores between the nanocrystals, and moreover, grooving small features of few tens of nm should be feasible. However, we encountered that the use of such MEL suspensions still leads to films with relatively wide pore size distribution.We synthesized MEL nanocrystal suspensions following carefully the described procedures in ref.[1] ...