Nanopowder Management and Plasma Parameters in Nanofabrication of Low-Dimensional Quantum Structures in Reactive Silane-Based Plasmas

Ostrikov, K.; Denysenko, I.; Yu, M. Y.; Xu, Shuyan

doi:10.1238/physica.regular.072a00277

Cited by 7 publications

(7 citation statements)

References 13 publications

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“…Numerical solution of equation (6) for each nanoisland provides the electric charge density to be used in the set of equations (5). Thus, the total set of ion motion equations consists of 2N + 3 equations and allows the modelling of the ion motion in a combined electric field of the pattern made of N nanostructures on the substrate.…”

Section: Model Of Ion Current Distribution In Nanopatternsmentioning

confidence: 99%

“…Modern nanotechnology requires a high degree of determinism in fabricating nanostructures of various dimensionalities [1] such as zero-dimensional quantum dots [2][3][4][5], onedimensional (1D) nanorods, nanotips and nanowires [6][7][8][9][10][11], two-dimensional (2D) nanowalls [12,13] and nanocombs [14,15] and also numerous three-dimensional (3D) nanostructures (NSs) of complex shapes and nanocrystalline films [16]. These NSs find numerous applications in different areas spanning from construction engineering to optoelectronics and medicine.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Nanostructures of various dimensionalities from plasma and neutral fluxes

Levchenko¹,

Ostrikov²

2007

J. Phys. D: Appl. Phys.

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106

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A complex multi-scale model and numerical simulations are used to demonstrate, by simulating the development of patterns of nanotips, nanowalls, nanoislands and nanovoids of a characteristic size of 5–100 nm, a greater degree of determinism in the formation of various nanostructures by using the low-density, low-temperature plasma-based processes. It is shown that in the plasma, in contrast to the neutral gas-based processes, one can synthesize nanostructures of various dimensionalities and shapes with a larger surface density, desired geometrical parameters and narrower size distribution functions. This effect is mainly attributed to strong ion focusing by irregular electric fields in the nanopatterns, which effectively redistributes the influxes of plasma-generated building units and thus provides a selective control of their delivery to the growing nanostructures.

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Section: Model Of Ion Current Distribution In Nanopatternsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Nanostructures of various dimensionalities from plasma and neutral fluxes

Levchenko¹,

Ostrikov²

2007

J. Phys. D: Appl. Phys.

Self Cite

106

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“…3. Examples of other lowdimensional quantum-confinement structures (e.g., nanowells, ultrahigh-aspect-ratio nanowires) synthesized by using plasmabased methods can be found elsewhere [1], [21], [24], [35].…”

Section: Low-dimensional Quantum-confinement Structuresmentioning

confidence: 99%

Plasma Nanoscience: From Nature's Mastery to Deterministic Plasma-Aided Nanofabrication

Ostrikov

2007

IEEE Trans. Plasma Sci.

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This paper introduces the plasma-nanoscience research area and shows the way from Nature's mastery in assembling nanosized dust grains in the Universe to deterministic plasma-aided nanofabrication. The concept of deterministic nanoassembly is explained, and the multidisciplinary approach to bridge the spatial gap of nine orders of magnitude between the sizes of plasma reactors and atomic building units is discussed. Ongoing numerical simulation and experimental efforts on highly controlled synthesis of carbon nanotip and semiconducting quantum-dot structures show potential benefits of using ionizedgas environments in nanofabrication.

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“…The work by Chen and co-workers [104] in 1997 showed, for the first time, that the use of plasma-assisted CVD techniques allowed the growth of well-aligned carbon nanofibers. Lowpressure PECVD has also been recently used for the synthesis of large-area ordered patterns of single-crystal carbon nanotips [105,106] acting as nanoemitters, of great interest for the emerging electron-emitter display technology. The relation between this preferential alignment and the plasma field was clearly established by Bower et al [107] in nanotubes grown from a microwave discharge of acetylene and ammonia (see Fig.…”

Section: Carbon-based Nanostructuresmentioning

confidence: 99%

From Carbon Nanostructures to New Photoluminescence Sources: An Overview of New Perspectives and Emerging Applications of Low‐Pressure PECVD

Gordillo‐Vázquez¹,

Herrero²,

Tanarro³

2007

Chemical Vapor Deposition

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Low-pressure, plasma-enhanced (PE)CVD is a powerful and versatile technique that has been used for thin-film deposition and surface treatment since the early 1960s. However, it is only recently that it has been used in applications other than the different stages of microelectronic circuit fabrication. Now, PECVD is being used in emerging applications due to new materials and process requirements in a wide variety of areas, such as biomedical applications, solar cells, fuel cell development, fusion research, or the synthesis of silicon nanocrystals showing efficient photoluminescence, useful for future solid-state light sources. These new scenarios have stimulated further development of novel PECVD diagnostic techniques, together with fundamental experimental and theoretical studies aimed at a better understanding of some of the basic processes underlying the plasma/surface interaction. This paper gives an overview of some new research areas where PECVD is finding promising applications.

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Nanopowder Management and Plasma Parameters in Nanofabrication of Low-Dimensional Quantum Structures in Reactive Silane-Based Plasmas

Cited by 7 publications

References 13 publications

Nanostructures of various dimensionalities from plasma and neutral fluxes

Nanostructures of various dimensionalities from plasma and neutral fluxes

Plasma Nanoscience: From Nature's Mastery to Deterministic Plasma-Aided Nanofabrication

From Carbon Nanostructures to New Photoluminescence Sources: An Overview of New Perspectives and Emerging Applications of Low‐Pressure PECVD

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