Nanoscale Cu/Ta multilayer deposition by co-sputtering on a rotating substrate. Empirical model and experiment

Müller, Claudia Manuela; Sologubenko, Alla S.; Gerstl, Stephan S.A.; Süess, Martin; Courty, Diana; Spolenak, Ralph

doi:10.1016/j.surfcoat.2016.06.024

Cited by 26 publications

(11 citation statements)

References 43 publications

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“…Based on the XRD patterns, the composition, and the TEM imaging, it can be seen that, although the individual grains are small, the coatings exhibit a high degree of crystallinity with only a negligible volume of any amorphous phase. The measured hardness corresponds to that measured for tantalum carbide coatings of [25][26][27][28][29][30][31][32][33][34][35]50] and nanocomposite tantalum diboride coatings with a hardness of 30-40 GPa [30]. The second area at the intersection of the two deposition lines also exhibits higher compressive stress of ∼−3 GPa.…”

Section: Mechanical Propertiessupporting

confidence: 72%

“…The substrates typically move around and in front of a stationary source or sources of the thin-film forming species to uniformly coat complex objects [34]. Such geometry typically introduces the growth of a multilayered structure of the coating when multiple sources are used simultaneously, or reactive gases are introduced during the deposition [35][36][37]. Recently, the appearance of the multilayered structure of magnetron sputtered W-B-C coatings was even reported in non-reactive sputtering from a single cathode [26].…”

Section: Introductionmentioning

confidence: 99%

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Composition, Structure and Mechanical Properties of Industrially Sputtered Ta–B–C Coatings

et al. 2020

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Ta–B–C coatings were non-reactively sputter-deposited in an industrial batch coater from a single segmented rotating cylindrical cathode employing a combinatorial approach. The chemical composition, morphology, microstructure, mechanical properties, and fracture resistance of the coatings were investigated. Their mechanical properties were linked to their microstructure and phase composition. Coatings placed stationary in front of the racetrack of the target and those performing a 1-axis rotation around the substrate carousel are compared. Utilization of the substrate rotation has no significant effect on the chemical composition of the coatings deposited at the same position compared to the cathode. Whereas the morphology of coatings with corresponding chemical composition is similar for stationary as well as rotating samples, the rotating coatings exhibit a distinct multilayered structure with a repetition period in the range of nanometers despite utilizing a non-reactive process and a single sputter source. All the coatings are either amorphous, nanocomposite or nanocrystalline depending on their chemical composition. The presence of TaC, TaB, and/or TaB2 phases is identified. The crystallite size is typically less than 5 nm. The highest hardness of the coatings is associated with the presence of larger grains in a nanocomposite structure or formation of polycrystalline coatings. The number, density, and length of cracks observed after high-load indentation is on par with current optimized commercially available protective coatings.

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Section: Mechanical Propertiessupporting

confidence: 72%

Section: Introductionmentioning

confidence: 99%

Composition, Structure and Mechanical Properties of Industrially Sputtered Ta–B–C Coatings

et al. 2020

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“…This model is used in several works by Panjan et al to highlight influence of rotation on multilayer stoichiometry and periodicity [16][17][18][19]. A similar approach has been also used to investigate the multilayers formation as a function of substrate rotation speed in the case of co-sputtering deposition by confocal sources [20]. Unfortunately, all these work are applicable only for flat substrates.…”

Section: Introductionmentioning

confidence: 99%

Study of the influence of the pressure and rotational motion of 3D substrates processed by magnetron sputtering: A comparative study between Monte Carlo modelling and experiments

Evrard

Besnard

Lucas

2019

Surface and Coatings Technology

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Over the last ten years, low pressure plasma solutions for materials surface treatment have been remarkable. Nevertheless, the deposition of films with a uniform thickness on 3D complex shapes is still a challenge for various deposition systems. In several cases, concavities and different substrate orientations and motions lead to macroscopic shadowing and affect the thickness uniformity. The objective of this work is to describe a modelling method able to predict the layer thickness on any surface of 3D substrates in motion and subject to vapour transported in a low pressure vessel. The meshing of objects with Delaunay-triangulation enables the modelling of complex shapes. The deposition process consists of several Monte Carlo simulations involving first the computing of the angular and energy particles distribution from the source, second their transport through the chamber and last the deposition on a meshed substrate. The algorithm is optimised with a "cell-list-linked-like" method and differs from existing models by the computation speed. The benchmarking between simulation and experimental results for Cr, Ag and Ta deposition at various pressures and on moving complex substrates with several shadowed faces is presented. Moreover, particle energy distribution will be discussed for each sample surface, mode and pressure.

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“…In this paper, ReB 2 is introduced as a multilayer system and is combined with tantalum nitride (TaN) to synthetize ReB 2 /TaN multilayers. We choose the TaN layer as a component of the multilayers because TaN and Ta have been extensively used in coating systems due to their good diffusion barrier properties and their relatively stable structure [ 6 , 7 , 8 , 9 , 10 , 11 , 12 ]. In addition, TaN is effective in forming nano-crystalline characteristics in multilayers [ 13 , 14 , 15 , 16 ].…”

Section: Introductionmentioning

confidence: 99%

Interfacial Model and Characterization for Nanoscale ReB2/TaN Multilayers at Desired Modulation Period and Ratios: First-Principles Calculations and Experimental Investigations

Jin

2018

Nanomaterials

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The interfacial structure of ReB2/TaN multilayers at varied modulation periods (Λ) and modulation ratios (tReB2:tTaN) was investigated using key experiments combined with first-principles calculations. A maximum hardness of 38.7 GPa occurred at Λ = 10 nm and tReB2:tTaN = 1:1. The fine nanocrystalline structure with small grain sizes remained stable for individual layers at Λ= 10 nm and tReB2:tTaN = 1:1. The calculation of the interfacial structure model and interfacial energy was performed using the first principles to advance the in-depth understanding of the relationship between the mechanical properties, residual stresses, and the interfacial structure. The B-Ta interfacial configuration was calculated to have the highest adsorption energy and the lowest interfacial energy. The interfacial energy and adsorption energy at different tReB2:tTaN followed the same trend as that of the residual stress. The 9ReB2/21TaN interfacial structure in the B-Ta interfacial configuration was found to be the most stable interface in which the highest adsorption energy and the lowest interfacial energy were obtained. The chemical bonding between the neighboring B atom and the Ta atom in the interfaces showed both covalency and iconicity, which provided a theoretical interpretation of the relationship between the residual stress and the stable interfacial structure of the ReB2/TaN multilayer.

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Nanoscale Cu/Ta multilayer deposition by co-sputtering on a rotating substrate. Empirical model and experiment

Cited by 26 publications

References 43 publications

Composition, Structure and Mechanical Properties of Industrially Sputtered Ta–B–C Coatings

Composition, Structure and Mechanical Properties of Industrially Sputtered Ta–B–C Coatings

Study of the influence of the pressure and rotational motion of 3D substrates processed by magnetron sputtering: A comparative study between Monte Carlo modelling and experiments

Interfacial Model and Characterization for Nanoscale ReB2/TaN Multilayers at Desired Modulation Period and Ratios: First-Principles Calculations and Experimental Investigations

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