2009
DOI: 10.1063/1.3130123
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Nanoscale deformation mechanism of TiC/a-C nanocomposite thin films

Abstract: Structure and mechanical properties of nanoscale multilayered CrN/ZrSiN coatings J.This paper concentrates on the deformation behavior of amorphous diamondlike carbon composite materials. Combined nanoindentation and ex situ cross-sectional transmission electron microscopy investigations are carried out on TiC/a-C nanocomposite films, with and without multilayered structures deposited by pulse dc magnetron sputtering. It is shown that by controlling the distribution of nanocrystallites forming nanoscale multil… Show more

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Cited by 30 publications
(7 citation statements)
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“…It is likely this approach could be successfully extrapolated to more complex DLC-based coatings. 51,52 V. CONCLUSIONS Simulation studies show that in uncoated silicon the hydrostatic stresses developed beneath the indenter are significantly higher than the shear stresses, consistent with observations that phase transformation is the dominant deformation mechanism. The presence of the DLC coating above Si provides load shielding and alters the distribution of stresses experienced by the substrate, lowering both the hydrostatic and the shear stresses.…”
Section: Discussionsupporting
confidence: 67%
“…It is likely this approach could be successfully extrapolated to more complex DLC-based coatings. 51,52 V. CONCLUSIONS Simulation studies show that in uncoated silicon the hydrostatic stresses developed beneath the indenter are significantly higher than the shear stresses, consistent with observations that phase transformation is the dominant deformation mechanism. The presence of the DLC coating above Si provides load shielding and alters the distribution of stresses experienced by the substrate, lowering both the hydrostatic and the shear stresses.…”
Section: Discussionsupporting
confidence: 67%
“…According to previous work, H 3 /E 2 and H/E are suggested as an indicator of toughness, namely the resistance to plastic deformation and wear resistance, respectively. 9,28,29 The film with high H 3 /E 2 and H/E values indicates that nanomultilayer deposited under graded bias voltage may display high toughness.…”
Section: Resultsmentioning
confidence: 99%
“…Diamond like carbon (DLC) films are of significant interest because of their unique combination of chemical-physical properties, high wear resistance and low friction [5]. Nanocomposite coatings based on dispersion of TiC nanocrystalline phases in solid lubricant phases like amorphous carbon (a-C) or amorphous hydrocarbon (a-C:H) have been shown to enhance the hardness and toughness while maintaining the low coefficient of friction [6][7][8][9][10]. Such films show great potential for exploitation as a protective and lubricant layer to enhance the wear resistance of many tribological applications in ambient air or in vacuum.…”
Section: Introductionmentioning
confidence: 99%