2013
DOI: 10.1021/ja401785h
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Nanoscale Growth and Patterning of Inorganic Oxides Using DNA Nanostructure Templates

Abstract: We describe a method to form custom-shaped inorganic oxide nanostructures by using DNA nanostructure templates. We show that a DNA nanostructure can modulate the rate of chemical vapor deposition of SiO2 and TiO2 with nanometer-scale spatial resolution. The resulting oxide nanostructure inherits its shape from the DNA template. This method generates both positive-tone and negative-tone patterns on a wide range of substrates and is compatible with conventional silicon nanofabrication processes. Our result opens… Show more

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Cited by 98 publications
(109 citation statements)
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“…35,36 Our group has used this DNA nanostructure as the template for a number of bottom-up nanofabrication work, including etching and masking of SiO 2 28 and templated chemical vapor deposition of inorganic oxides. 29 For this study, the DNA nanostructures were deposited onto a silicon wafer with ∼1 nm thick layer of SiO 2 . Previous study suggested that the interaction between DNA and SiO 2 is mediated by Mg 2+ ions.…”
Section: ■ Results and Discussionmentioning
confidence: 99%
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“…35,36 Our group has used this DNA nanostructure as the template for a number of bottom-up nanofabrication work, including etching and masking of SiO 2 28 and templated chemical vapor deposition of inorganic oxides. 29 For this study, the DNA nanostructures were deposited onto a silicon wafer with ∼1 nm thick layer of SiO 2 . Previous study suggested that the interaction between DNA and SiO 2 is mediated by Mg 2+ ions.…”
Section: ■ Results and Discussionmentioning
confidence: 99%
“…The mixed DNA solution was annealed and filtered following our previously published procedure. 28,29 Deposition of DNA Origami Nanostructures onto Si Wafer. A Si wafer with a native oxide layer was cleaned by immersing it in a hot piranha solution (3/7 (v/v) hydrogen peroxide/sulfuric acid solution) for a minimum of 20 min.…”
Section: ■ Introductionmentioning
confidence: 99%
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“…2832 The majority of the work reported so far, however, has involved NP functionalization with DNA after the NPs are synthesized, 3337 thereby the DNA could not influence the NP morphology. A few recent studies using DNA in NP synthesis reported encouraging findings that different DNA sequences can influence both the structure and property of the nanomaterials.…”
Section: Discovery Of Dna “Genetic Codes” To Control Nanoparticle Mormentioning
confidence: 99%
“…Besides the etching modulation, Surwade et al found that the DNA origami could also affect the growth rate of SiO 2 and TiO 2 at room temperature in a tetraethyl orthosilicate (TEOS)-based chemical vapor deposition (CVD) process, as demonstrated in Figure 7b [104]. A variety of substrates, including Si wafer, mica and gold, can be used in this CVD process.…”
Section: Dna Nanolithographymentioning
confidence: 99%